InP-Based Grating Antennas for High-Resolution Optical Beam Steering
Optical beam steerers on InP integrated photonics have not been able to offer high angular resolution, due to the technological challenges in realizing a large emission aperture. In this paper, we propose the creation of waveguide-based grating antennas fabricated in SiO 2 super-cladding on InP memb...
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| Veröffentlicht in: | IEEE journal of selected topics in quantum electronics 2021-01, Vol.27 (1), p.1-7 |
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| creator | Wang, Yi van Engelen, Jorn P. Reniers, Sander F. G. van Rijn, Manuel B. J. Zhang, Xuebing Cao, Zizheng Dolores-Calzadilla, Victor Williams, Kevin A. Smit, Meint K. Jiao, Yuqing |
| description | Optical beam steerers on InP integrated photonics have not been able to offer high angular resolution, due to the technological challenges in realizing a large emission aperture. In this paper, we propose the creation of waveguide-based grating antennas fabricated in SiO 2 super-cladding on InP membrane on silicon (IMOS) to achieve simultaneously high resolution and good compatibility with InP-based active devices. By exploiting the high dry etch selectivity between SiO 2 and InP, a tolerant fabrication process is proposed and demonstrated, allowing for high controllability in the process. Device parameters including buffer thickness and pitch have been explored to obtain an optimized design. A 2-mm long grating antenna is fabricated and shows a record narrow full-width-half-maximum angular beam width of 0.05° and a high spatial resolution of more than 250 points when the wavelength is tuned over a range of 100 nm. |
| doi_str_mv | 10.1109/JSTQE.2019.2958999 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_crossref_primary_10_1109_JSTQE_2019_2958999</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>8931248</ieee_id><sourcerecordid>2424545796</sourcerecordid><originalsourceid>FETCH-LOGICAL-c454t-c6f576ea19fc8abc536da65ae3cf4f21d8e878fbda26b60d876c6759f151038b3</originalsourceid><addsrcrecordid>eNo9kE1PAjEQhhujiYj-Ab1s4nmx7W677RGQL0OCCibemm53iktgF9ty8N9bhHiaObzPvJMHoXuCe4Rg-fSyXL2NehQT2aOSCSnlBeoQxkSas5xexh0XRUo5_rxGN95vMMYiF7iDnmfNazrQHqpk4nSom3XSbwI0jfaJbV0yrddf6Tv4dnsIddski32ojd4mA9C7ZBkAXERu0ZXVWw9359lFH-PRajhN54vJbNifpyZ-EVLDLSs4aCKtEbo0LOOV5kxDZmxuKakEiELYstKUlxxXouCGF0xawgjORJl10ePp7t613wfwQW3ag2tipaI5jR2skDym6CllXOu9A6v2rt5p96MIVkdb6s-WOtpSZ1sRejhBNQD8A0JmhOYi-wUkAmXW</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2424545796</pqid></control><display><type>article</type><title>InP-Based Grating Antennas for High-Resolution Optical Beam Steering</title><source>IEEE Electronic Library (IEL)</source><creator>Wang, Yi ; van Engelen, Jorn P. ; Reniers, Sander F. G. ; van Rijn, Manuel B. J. ; Zhang, Xuebing ; Cao, Zizheng ; Dolores-Calzadilla, Victor ; Williams, Kevin A. ; Smit, Meint K. ; Jiao, Yuqing</creator><creatorcontrib>Wang, Yi ; van Engelen, Jorn P. ; Reniers, Sander F. G. ; van Rijn, Manuel B. J. ; Zhang, Xuebing ; Cao, Zizheng ; Dolores-Calzadilla, Victor ; Williams, Kevin A. ; Smit, Meint K. ; Jiao, Yuqing</creatorcontrib><description>Optical beam steerers on InP integrated photonics have not been able to offer high angular resolution, due to the technological challenges in realizing a large emission aperture. In this paper, we propose the creation of waveguide-based grating antennas fabricated in SiO 2 super-cladding on InP membrane on silicon (IMOS) to achieve simultaneously high resolution and good compatibility with InP-based active devices. By exploiting the high dry etch selectivity between SiO 2 and InP, a tolerant fabrication process is proposed and demonstrated, allowing for high controllability in the process. Device parameters including buffer thickness and pitch have been explored to obtain an optimized design. A 2-mm long grating antenna is fabricated and shows a record narrow full-width-half-maximum angular beam width of 0.05° and a high spatial resolution of more than 250 points when the wavelength is tuned over a range of 100 nm.</description><identifier>ISSN: 1077-260X</identifier><identifier>EISSN: 1558-4542</identifier><identifier>DOI: 10.1109/JSTQE.2019.2958999</identifier><identifier>CODEN: IJSQEN</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>5G mobile communication ; Angular resolution ; Antennas ; Apertures ; Beam steering ; Controllability ; Design optimization ; High resolution ; InP photonics ; LiDAR ; optical phased array ; Process parameters ; Selectivity ; Silicon dioxide ; Spatial resolution ; waveguide grating ; Waveguides</subject><ispartof>IEEE journal of selected topics in quantum electronics, 2021-01, Vol.27 (1), p.1-7</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2021</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c454t-c6f576ea19fc8abc536da65ae3cf4f21d8e878fbda26b60d876c6759f151038b3</citedby><cites>FETCH-LOGICAL-c454t-c6f576ea19fc8abc536da65ae3cf4f21d8e878fbda26b60d876c6759f151038b3</cites><orcidid>0000-0003-2757-8948 ; 0000-0001-7065-370X ; 0000-0003-2812-2950 ; 0000-0002-6750-2625 ; 0000-0002-4774-7545 ; 0000-0002-9408-2267</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/8931248$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/8931248$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Wang, Yi</creatorcontrib><creatorcontrib>van Engelen, Jorn P.</creatorcontrib><creatorcontrib>Reniers, Sander F. G.</creatorcontrib><creatorcontrib>van Rijn, Manuel B. J.</creatorcontrib><creatorcontrib>Zhang, Xuebing</creatorcontrib><creatorcontrib>Cao, Zizheng</creatorcontrib><creatorcontrib>Dolores-Calzadilla, Victor</creatorcontrib><creatorcontrib>Williams, Kevin A.</creatorcontrib><creatorcontrib>Smit, Meint K.</creatorcontrib><creatorcontrib>Jiao, Yuqing</creatorcontrib><title>InP-Based Grating Antennas for High-Resolution Optical Beam Steering</title><title>IEEE journal of selected topics in quantum electronics</title><addtitle>JSTQE</addtitle><description>Optical beam steerers on InP integrated photonics have not been able to offer high angular resolution, due to the technological challenges in realizing a large emission aperture. In this paper, we propose the creation of waveguide-based grating antennas fabricated in SiO 2 super-cladding on InP membrane on silicon (IMOS) to achieve simultaneously high resolution and good compatibility with InP-based active devices. By exploiting the high dry etch selectivity between SiO 2 and InP, a tolerant fabrication process is proposed and demonstrated, allowing for high controllability in the process. Device parameters including buffer thickness and pitch have been explored to obtain an optimized design. A 2-mm long grating antenna is fabricated and shows a record narrow full-width-half-maximum angular beam width of 0.05° and a high spatial resolution of more than 250 points when the wavelength is tuned over a range of 100 nm.</description><subject>5G mobile communication</subject><subject>Angular resolution</subject><subject>Antennas</subject><subject>Apertures</subject><subject>Beam steering</subject><subject>Controllability</subject><subject>Design optimization</subject><subject>High resolution</subject><subject>InP photonics</subject><subject>LiDAR</subject><subject>optical phased array</subject><subject>Process parameters</subject><subject>Selectivity</subject><subject>Silicon dioxide</subject><subject>Spatial resolution</subject><subject>waveguide grating</subject><subject>Waveguides</subject><issn>1077-260X</issn><issn>1558-4542</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNo9kE1PAjEQhhujiYj-Ab1s4nmx7W677RGQL0OCCibemm53iktgF9ty8N9bhHiaObzPvJMHoXuCe4Rg-fSyXL2NehQT2aOSCSnlBeoQxkSas5xexh0XRUo5_rxGN95vMMYiF7iDnmfNazrQHqpk4nSom3XSbwI0jfaJbV0yrddf6Tv4dnsIddski32ojd4mA9C7ZBkAXERu0ZXVWw9359lFH-PRajhN54vJbNifpyZ-EVLDLSs4aCKtEbo0LOOV5kxDZmxuKakEiELYstKUlxxXouCGF0xawgjORJl10ePp7t613wfwQW3ag2tipaI5jR2skDym6CllXOu9A6v2rt5p96MIVkdb6s-WOtpSZ1sRejhBNQD8A0JmhOYi-wUkAmXW</recordid><startdate>202101</startdate><enddate>202101</enddate><creator>Wang, Yi</creator><creator>van Engelen, Jorn P.</creator><creator>Reniers, Sander F. G.</creator><creator>van Rijn, Manuel B. J.</creator><creator>Zhang, Xuebing</creator><creator>Cao, Zizheng</creator><creator>Dolores-Calzadilla, Victor</creator><creator>Williams, Kevin A.</creator><creator>Smit, Meint K.</creator><creator>Jiao, Yuqing</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-2757-8948</orcidid><orcidid>https://orcid.org/0000-0001-7065-370X</orcidid><orcidid>https://orcid.org/0000-0003-2812-2950</orcidid><orcidid>https://orcid.org/0000-0002-6750-2625</orcidid><orcidid>https://orcid.org/0000-0002-4774-7545</orcidid><orcidid>https://orcid.org/0000-0002-9408-2267</orcidid></search><sort><creationdate>202101</creationdate><title>InP-Based Grating Antennas for High-Resolution Optical Beam Steering</title><author>Wang, Yi ; van Engelen, Jorn P. ; Reniers, Sander F. G. ; van Rijn, Manuel B. J. ; Zhang, Xuebing ; Cao, Zizheng ; Dolores-Calzadilla, Victor ; Williams, Kevin A. ; Smit, Meint K. ; Jiao, Yuqing</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c454t-c6f576ea19fc8abc536da65ae3cf4f21d8e878fbda26b60d876c6759f151038b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>5G mobile communication</topic><topic>Angular resolution</topic><topic>Antennas</topic><topic>Apertures</topic><topic>Beam steering</topic><topic>Controllability</topic><topic>Design optimization</topic><topic>High resolution</topic><topic>InP photonics</topic><topic>LiDAR</topic><topic>optical phased array</topic><topic>Process parameters</topic><topic>Selectivity</topic><topic>Silicon dioxide</topic><topic>Spatial resolution</topic><topic>waveguide grating</topic><topic>Waveguides</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wang, Yi</creatorcontrib><creatorcontrib>van Engelen, Jorn P.</creatorcontrib><creatorcontrib>Reniers, Sander F. G.</creatorcontrib><creatorcontrib>van Rijn, Manuel B. J.</creatorcontrib><creatorcontrib>Zhang, Xuebing</creatorcontrib><creatorcontrib>Cao, Zizheng</creatorcontrib><creatorcontrib>Dolores-Calzadilla, Victor</creatorcontrib><creatorcontrib>Williams, Kevin A.</creatorcontrib><creatorcontrib>Smit, Meint K.</creatorcontrib><creatorcontrib>Jiao, Yuqing</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE journal of selected topics in quantum electronics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Wang, Yi</au><au>van Engelen, Jorn P.</au><au>Reniers, Sander F. G.</au><au>van Rijn, Manuel B. J.</au><au>Zhang, Xuebing</au><au>Cao, Zizheng</au><au>Dolores-Calzadilla, Victor</au><au>Williams, Kevin A.</au><au>Smit, Meint K.</au><au>Jiao, Yuqing</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>InP-Based Grating Antennas for High-Resolution Optical Beam Steering</atitle><jtitle>IEEE journal of selected topics in quantum electronics</jtitle><stitle>JSTQE</stitle><date>2021-01</date><risdate>2021</risdate><volume>27</volume><issue>1</issue><spage>1</spage><epage>7</epage><pages>1-7</pages><issn>1077-260X</issn><eissn>1558-4542</eissn><coden>IJSQEN</coden><abstract>Optical beam steerers on InP integrated photonics have not been able to offer high angular resolution, due to the technological challenges in realizing a large emission aperture. In this paper, we propose the creation of waveguide-based grating antennas fabricated in SiO 2 super-cladding on InP membrane on silicon (IMOS) to achieve simultaneously high resolution and good compatibility with InP-based active devices. By exploiting the high dry etch selectivity between SiO 2 and InP, a tolerant fabrication process is proposed and demonstrated, allowing for high controllability in the process. Device parameters including buffer thickness and pitch have been explored to obtain an optimized design. A 2-mm long grating antenna is fabricated and shows a record narrow full-width-half-maximum angular beam width of 0.05° and a high spatial resolution of more than 250 points when the wavelength is tuned over a range of 100 nm.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSTQE.2019.2958999</doi><tpages>7</tpages><orcidid>https://orcid.org/0000-0003-2757-8948</orcidid><orcidid>https://orcid.org/0000-0001-7065-370X</orcidid><orcidid>https://orcid.org/0000-0003-2812-2950</orcidid><orcidid>https://orcid.org/0000-0002-6750-2625</orcidid><orcidid>https://orcid.org/0000-0002-4774-7545</orcidid><orcidid>https://orcid.org/0000-0002-9408-2267</orcidid><oa>free_for_read</oa></addata></record> |
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| subjects | 5G mobile communication Angular resolution Antennas Apertures Beam steering Controllability Design optimization High resolution InP photonics LiDAR optical phased array Process parameters Selectivity Silicon dioxide Spatial resolution waveguide grating Waveguides |
| title | InP-Based Grating Antennas for High-Resolution Optical Beam Steering |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-09T22%3A46%3A15IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=InP-Based%20Grating%20Antennas%20for%20High-Resolution%20Optical%20Beam%20Steering&rft.jtitle=IEEE%20journal%20of%20selected%20topics%20in%20quantum%20electronics&rft.au=Wang,%20Yi&rft.date=2021-01&rft.volume=27&rft.issue=1&rft.spage=1&rft.epage=7&rft.pages=1-7&rft.issn=1077-260X&rft.eissn=1558-4542&rft.coden=IJSQEN&rft_id=info:doi/10.1109/JSTQE.2019.2958999&rft_dat=%3Cproquest_RIE%3E2424545796%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2424545796&rft_id=info:pmid/&rft_ieee_id=8931248&rfr_iscdi=true |