Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz
Single-mode TE10 rectangular waveguides operating near 3 THz have been demonstrated. The waveguides have internal dimensions of 75 μm × 37 μm (WR-0.3) and are fabricated using an additive gold electroplating process on a silicon substrate. The impact of photoresist removal holes was minimized by ful...
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| Veröffentlicht in: | IEEE journal of selected topics in quantum electronics 2011-01, Vol.17 (1), p.130-137 |
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| container_title | IEEE journal of selected topics in quantum electronics |
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| creator | Nordquist, C D Wanke, M C Rowen, A M Arrington, C L Grine, A D Fuller, C T |
| description | Single-mode TE10 rectangular waveguides operating near 3 THz have been demonstrated. The waveguides have internal dimensions of 75 μm × 37 μm (WR-0.3) and are fabricated using an additive gold electroplating process on a silicon substrate. The impact of photoresist removal holes was minimized by full-wave design of the hole and matching structures. Waveguides were measured at three frequencies from 2.56 to 3.11 THz and demonstrated loss as low as 1.3 dB/mm at 3.11 THz, corresponding to a loss per wavelength of 0.12 dB/λ. This paper summarizes the design, fabrication, and measurement of these micromachined waveguides operating near 3 THz. |
| doi_str_mv | 10.1109/JSTQE.2010.2049095 |
| format | Article |
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| source | IEEE Electronic Library (IEL) |
| subjects | Additives Frequency measurement Gold Internal dimensions Loss measurement Micromachining Micromechanics Noise levels Optical device fabrication Rectangular waveguides Resists Silicon Silicon substrates submillimeter wave technology Surface waves Waveguides Wavelength measurement Wavelengths |
| title | Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz |
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