Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz

Properties of Surface Metal Micromachined Rectangular Waveguide Operating Near 3 THz

Single-mode TE10 rectangular waveguides operating near 3 THz have been demonstrated. The waveguides have internal dimensions of 75 μm × 37 μm (WR-0.3) and are fabricated using an additive gold electroplating process on a silicon substrate. The impact of photoresist removal holes was minimized by ful...

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Veröffentlicht in:IEEE journal of selected topics in quantum electronics 2011-01, Vol.17 (1), p.130-137
Hauptverfasser: Nordquist, C D, Wanke, M C, Rowen, A M, Arrington, C L, Grine, A D, Fuller, C T
Format: Artikel
Sprache:eng
Schlagworte:
Additives
Frequency measurement
Gold
Internal dimensions
Loss measurement
Micromachining
Micromechanics
Noise levels
Optical device fabrication
Rectangular waveguides
Resists
Silicon
Silicon substrates
submillimeter wave technology
Surface waves
Waveguides
Wavelength measurement
Wavelengths
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Zusammenfassung:Single-mode TE10 rectangular waveguides operating near 3 THz have been demonstrated. The waveguides have internal dimensions of 75 μm × 37 μm (WR-0.3) and are fabricated using an additive gold electroplating process on a silicon substrate. The impact of photoresist removal holes was minimized by full-wave design of the hole and matching structures. Waveguides were measured at three frequencies from 2.56 to 3.11 THz and demonstrated loss as low as 1.3 dB/mm at 3.11 THz, corresponding to a loss per wavelength of 0.12 dB/λ. This paper summarizes the design, fabrication, and measurement of these micromachined waveguides operating near 3 THz.
ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2010.2049095