Nanophotonics Sensor Based on Microcantilever for Chemical Analysis
A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever...
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| Veröffentlicht in: | IEEE journal of selected topics in quantum electronics 2009-09, Vol.15 (5), p.1323-1326 |
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| container_title | IEEE journal of selected topics in quantum electronics |
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| creator | Xiang, Wenfeng Lee, Chengkuo |
| description | A Si-based cantilever sensor with photonic crystal (PC) resonator as readout for chemical sensing and analysis has been developed. The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z -displacement and strain of Si/SiO 2 cantilever sensor are derived as 0.6 mum and 0.0098% in water and 0.812 mum and 0.0144% in air, respectively. This novel micromechanical sensor shows its promising future in applications such as detection of proteins and DNA in solution. |
| doi_str_mv | 10.1109/JSTQE.2009.2016578 |
| format | Article |
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The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z -displacement and strain of Si/SiO 2 cantilever sensor are derived as 0.6 mum and 0.0098% in water and 0.812 mum and 0.0144% in air, respectively. 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The resonant wavelength shift of PC resonator is resulted from PC deformation induced by cantilever bending, in which this optical readout scheme facilitates cantilever deflection measurements in liquid. Through numerical simulation, we demonstrate that the detection capability of this micromechanical sensor operated in water is better than that of sensor operated in air. The minimum detectable Z -displacement and strain of Si/SiO 2 cantilever sensor are derived as 0.6 mum and 0.0098% in water and 0.812 mum and 0.0144% in air, respectively. This novel micromechanical sensor shows its promising future in applications such as detection of proteins and DNA in solution.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSTQE.2009.2016578</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
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| ispartof | IEEE journal of selected topics in quantum electronics, 2009-09, Vol.15 (5), p.1323-1326 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Chemical analysis Chemical sensors Computer simulation Deflection Mathematical models MEMS microcantilever Micromechanical devices Nanomaterials nanomechanical sensor Nanophotonics Nanostructure NEMS Optical resonators Optical sensors Optoelectronic and photonic sensors photonic crystal resonator Photonic crystals Polycarbonates Resonance Resonators Sensors Wavelength measurement |
| title | Nanophotonics Sensor Based on Microcantilever for Chemical Analysis |
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