Research on structural failure of MEMS safety and arming device considering uncertainty in fabrication errors

This paper presents an efficient methodology for assessing the structural failure of microelectromechanical systems (MEMS) used in safety and arming devices (SAD) while taking into account the effect of fabrication errors. The proposed methodology uses statistical characteristics that are assessed u...

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Veröffentlicht in:	IEEE sensors journal 2023-07, Vol.23 (14), p.1-1
Hauptverfasser:	Lei, Shenghong, Cao, Yun, Wang, He, Zhu, Hengbo, Lu, Haining, Pei, Xiangbo, Jiang, Chao, Yao, Jianyong, Nie, Weirong, Xi, Zhanwen
Format:	Artikel
Sprache:	eng
Schlagworte:	Errors Fabrication fabrication error failure probability Finite element method Mathematical models Methodology Microelectromechanical systems microelectromechanical systems (MEMS) Micromechanical devices Parameter sensitivity Polynomials Prototypes Safety safety and arming device (SAD) sensitivity Sensors Statistical analysis Structural failure Uncertainty Uncertainty analysis
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