Enhanced performance of weak magnetic field sensor based on laminated cantilever: theoretical analysis and experimental verification

The present study introduces a weak magnetic field sensor that utilizes a laminated cantilever structure, consisting of a magnetostrictive layer, a piezoelectric layer, and a substrate layer. Consequently, the transformation from the magnetic signal to the electrical signal is accomplished through t...

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Veröffentlicht in:	IEEE sensors journal 2023-05, Vol.23 (10), p.1-1
Hauptverfasser:	Keli, Zhao, Peng, Pang, Binghe, Ma, Xingxu, Zhang, Jian, Luo, Tao, Ye, Zhonggang, Zhang, Guangyao, Pei, Yunzhe, Liu, Tao, Zhang, Wei, Gao, Jinjun, Deng
Format:	Artikel
Sprache:	eng
Schlagworte:	Cantilever members Design optimization Doped zinc oxide Electrons Galfenol High ME coefficient Laminates Magnetic fields Magnetic properties Magnetic resonance Magnetic sensors Magnetic signals Magnetoelectric cantilever Magnetostriction MEMS Microscopy Performance enhancement Piezoelectricity Resonant frequencies Saturation magnetization Sensors Silicon substrates Substrates Vanadium Verification Weak magnetic field sensor X ray powder diffraction
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