Experimental Study of a Real-Time and Highly Sensitive Fiber-Optic Porous Silicon Temperature Sensing Probe

We report the development of a temperature sensing probe created as a result of the combination of an optical fiber and a porous silicon microcavity (PSMC). After determining the physical parameters of the PSMC to achieve the required porous sensing structure, it was fabricated by electrochemically...

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Veröffentlicht in:	IEEE sensors journal 2018-07, Vol.18 (13), p.5361-5367
Hauptverfasser:	Caroselli, Raffaele, Sanchez, David Martin, Ponce-Alcantara, Salvador, Prats Quilez, Francisco, Torrijos Moran, Luis, Garcia-Ruperez, Jaime
Format:	Artikel
Sprache:	eng
Schlagworte:	Bragg reflector Detection Etching Fiber optics Fiber-optic sensor microcavity Optical fiber sensors Optical fibers Physical properties Porous silicon Real time Sensitivity Silicon wafers temperature monitoring Temperature sensors
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