Root Cause Analysis of Zero-Rate Output Sources in an MEMS Gyroscope

This paper analyzes the root causes of zero-rate output (ZRO) in microelectromechanical system (MEMS) vibratory gyroscopes. ZRO is one of the major challenges for high-performance gyroscopes. The knowledge of its causes is important to minimize ZRO and achieve a robust sensor design. In this paper,...

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Veröffentlicht in:	IEEE sensors journal 2017-02, Vol.17 (4), p.959-966
Hauptverfasser:	Meyer, Lena, Buhmann, Alexander, Eid, Rudy, Korvink, Jan G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analytical models Damping Gyroscope Gyroscopes Mathematical model microelectromechanical system (MEMS) Micromechanical devices parametric state space models Sensors Springs zero-rate output (ZRO)
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