Individual Air-Borne Particle Mass Measurement Using High-Frequency Micromechanical Resonators

This work demonstrates mass measurement of individual submicron air-borne particles using resonant micromechanical nano-balances. Thermally actuated high-frequency single crystalline silicon resonators fabricated using a single mask process have been used as mass sensors. Mass sensitivity of the res...

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Veröffentlicht in:	IEEE sensors journal 2011-11, Vol.11 (11), p.2883-2890
Hauptverfasser:	Hajjam, A., Wilson, J. C., Pourkamali, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Air-borne particle Airborne particulates Airborne sensing Atmospheric measurements Cleanrooms Devices Frequency measurement mass sensor microelectromechanical systems (MEMS) Nanostructure Optical resonators Particle mass Particle measurements particle sensor piezoresistive readout Resonant frequencies Resonant frequency resonator Resonators Sensitivity Sensors thermal actuation
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