A Cross-Type Thermal Wind Sensor With Self-Testing Function

A 2-D smart flow sensor with self-testing function was designed, fabricated and tested in this paper. It is composed of cross-structure heaters and four symmetrically located sensing parts. When the flow angle changes in the clockwise direction, the temperature differences among the four parts, name...

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Veröffentlicht in:	IEEE sensors journal 2010-02, Vol.10 (2), p.340-346
Hauptverfasser:	Shen, Guang-Ping, Qin, Ming, Huang, Qing-An
Format:	Artikel
Sprache:	eng
Schlagworte:	Built-in self-test Clocks Flow angle Intelligent sensors Mechanical sensors self-test Silicon smart sensor Temperature sensors Testing thermal flow sensor Thermal sensors Velocity measurement Wind
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