$In-Situ Study of Dynamics of Refractive Index Changes in Silicon Devices Induced by UV-light Irradiation$

In-Situ Study of Dynamics of Refractive Index Changes in Silicon Devices Induced by UV-light Irradiation

Silicon photonics has been studied in various areas by providing small-footprint, high-performance, and mass-producible optoelectronic components integrated on a chip. For the photonic packaging, ultraviolet (UV) curing techniques have been widely utilized. Meanwhile, silica cladding absorption to U...

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Veröffentlicht in:	IEEE photonics journal 2022-08, Vol.14 (4), p.1-5
Hauptverfasser:	Wang, Jiaqi, Wei, Zhiwei, Qiu, Huabin, Xing, Zhengkun, Chen, Yuzhi, Geng, Youfu, Du, Yu, Li, Xuejin, Cheng, Zhenzhou
Format:	Artikel
Sprache:	eng
Schlagworte:	Densification Electronic packaging Focusing grating coupler Gratings integrated optics Light irradiation microring resonator Optical waveguides Optoelectronics photonic packing Photonics Radiation effects Recovery time Refractivity Resonators Silicon Silicon compounds Silicon devices Silicon dioxide Silicon photonics Temperature measurement Ultraviolet radiation waveguide
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