Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing

A Silicon waveguide incorporating a vertical slot filled with Al +3 doped ZnO is proposed for gas sensing. The effect of different device parameters, namely, slot-height, slot-width, and Si-width on two key optical features related to sensing, that is, difference in effective index and differential...

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Veröffentlicht in:	IEEE photonics journal 2018-08, Vol.10 (4), p.1-10
Hauptverfasser:	Bhattacharjee, Ritapa, Kejalakshmy, N. T., Rahman, B. M. Azizur
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Design optimization Detection Finite element method Gas sensors II-VI semiconductor materials Indexes Optical losses Optical waveguides Parameters Sensors Silicon Slot waveguide Zinc oxide
Online-Zugang:	Volltext
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