Laser Chemical Processing of n-Type Emitters for Solid-Phase Crystallized Polysilicon Thin-Film Solar Cells

We report on the application of laser chemical processing (LCP) to fabricate n-type emitters for polysilicon thin-film solar cells on glass. Sheet resistance values of 2-5 kΩ/□ with a peak phosphorus doping concentration in the range 8 × 10 18 -1 × 10 19 cm -3 at a shallow doping depth of less than...

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Veröffentlicht in:	IEEE journal of photovoltaics 2014-11, Vol.4 (6), p.1445-1451
Hauptverfasser:	Virasawmy, S., Widenborg, P. I., Palina, N., Ke, C., Wong, J., Varlamov, S., Tay, A. A. O., Hoex, B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Chemical lasers Crystalline materials Doping Laser chemical processing (LCP) laser doping Nd:YAG open-circuit voltage Photovoltaic cells polysilicon thin film Solar energy Suns-Voc Thin film devices Thin films
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