Sensitivity and Frequency Response Improvement of the Micro Thermal Convective Accelerometer With Structure Optimization

We present a theoretical model for transient analysis of the micro thermal convective accelerometer (MTCA). By leveraging this model, efficient parametric prediction can be calculated compared with time-consuming and complex CFD simulation and experimental testing. Based on the calculation results,...

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Veröffentlicht in:	Journal of microelectromechanical systems 2022-10, Vol.31 (5), p.753-759
Hauptverfasser:	Wang, Xiaoyi, Lee, Yi-Kuen, Xu, Wei
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometers Analytical models Detectors Frequency response Frequency variation Heating systems micro thermal convective accelerometer Optimization Sensitivity Sensors structure optimization Thin films Time factors Transient analysis Transient model
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