Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography

A 1D MEMS (Micro-Electro-Mechanical Systems) mirror for LiDAR applications, based on vertically asymmetric comb-drive electrostatic actuators, is presented in this work employing a novel fabrication process. This novel micromachining process combines typical SOI-based bulk micromachining and graysca...

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Veröffentlicht in:	Journal of microelectromechanical systems 2020-10, Vol.29 (5), p.734-740
Hauptverfasser:	Garcia, Ines S., Ferreira, Carlos, Santos, Joana D., Martins, Marco, Dias, Rosana A., Aguiam, Diogo E., Cabral, Jorge, Gaspar, Joao
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Asymmetry Bulk-micromachining process Electrodes Engineering Engineering, Electrical & Electronic Fabrication Field of view Gray scale grayscale Instruments & Instrumentation Lithography Low pressure Mechanical systems MEMS mirror Microelectromechanical systems Micromachining Micromechanical devices Mirrors Nanoscience & Nanotechnology Physical Sciences Physics Physics, Applied Resists scanner Science & Technology Science & Technology - Other Topics Self alignment Silicon Technology vertically asymmetric electrodes
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