A Closed-Loop Mode-Localized Accelerometer

This paper reports a closed-loop mode-localized accelerometer for the first time. The accelerometer utilizes weakly coupled single-tine resonators as the sensing element to decrease the number of vibration modes. Based on a proposed closed-loop readout technique, the transient responses of the mode-...

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Veröffentlicht in:	Journal of microelectromechanical systems 2018-04, Vol.27 (2), p.210-217
Hauptverfasser:	Yang, Jing, Zhong, Jiming, Chang, Honglong
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometer Accelerometers closed-loop readout mode localization Perturbation methods Resonators self-oscillation Sensitivity Sensor phenomena and characterization Vibrations weakly coupled resonators
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