Miniaturized Diaphragm Vacuum Pump by Multi-Material Additive Manufacturing

This paper reports the first demonstration of a multi-material, fully additively manufactured, miniature diaphragm pump for creation and maintenance of low vacuum from atmospheric conditions. Using polyjet 3-D printing technology with 42 μm XY pixelation and 16 μm or 25 μm tall voxels, a single-stag...

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Veröffentlicht in:	Journal of microelectromechanical systems 2017-12, Vol.26 (6), p.1316-1326
Hauptverfasser:	Taylor, Anthony P., Velasquez-Garcia, Luis Fernando
Format:	Artikel
Sprache:	eng
Schlagworte:	3-D printing of microsystems diaphragm pump miniature vacuum pump Optical surface waves polyjet printing Rough surfaces Surface roughness Surface topography Three-dimensional printing vacuum microelectro-mechanical systems (MEMS) Vacuum technology Young's modulus
Online-Zugang:	Volltext
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