A Planar Thin-Film Peltier Cooler for the Thermal Management of a Dew-Point Sensor System

The development of new application fields of microelectromechanical systems (MEMS) devices often implies a high degree of complexity and the integration of several functionalities within these devices. In this paper, thermoelectric planar thin-film microcoolers become more and more important due to...

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Veröffentlicht in:	Journal of microelectromechanical systems 2015-08, Vol.24 (4), p.990-996
Hauptverfasser:	Ihring, Andreas, Kessler, Ernst, Dillner, Ulrich, Schinkel, Uwe, Kunze, Michael, Billat, Sophie
Format:	Artikel
Sprache:	eng
Schlagworte:	Cooling dew-point sensor freestanding membrane In-plane thin-film Peltier cooler Legged locomotion Materials Plasma temperature Sb/BiSb thermoelectric material combination Temperature measurement Temperature sensors Thermal conductivity thermal management
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