Power Output Force Generation by a MEMS Phase Change Actuator

A microelectromechanical-systems-based phase change actuator has been developed and tested for high-speed mechanical power output and force generation. This actuator is well suited for a variety of advanced devices like tactile displays or micro fluidic systems. The device features two thin membrane...

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Bibliographische Detailangaben
Veröffentlicht in:	Journal of microelectromechanical systems 2011-12, Vol.20 (6), p.1287-1297
Hauptverfasser:	Weiss, L. W., Richards, C. D., Richards, R. F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuator Actuators Cavity resonators Devices engine Exact sciences and technology High speed Holes Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Membranes Microelectromechanical systems microelectromechanical systems (MEMS) Micromechanical devices and systems Phase change Phase change materials Physics Resistance heating Silicon nitride Switches Working fluids
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