Power Output Force Generation by a MEMS Phase Change Actuator
A microelectromechanical-systems-based phase change actuator has been developed and tested for high-speed mechanical power output and force generation. This actuator is well suited for a variety of advanced devices like tactile displays or micro fluidic systems. The device features two thin membrane...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2011-12, Vol.20 (6), p.1287-1297 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Weiss, L. W. Richards, C. D. Richards, R. F. |
| description | A microelectromechanical-systems-based phase change actuator has been developed and tested for high-speed mechanical power output and force generation. This actuator is well suited for a variety of advanced devices like tactile displays or micro fluidic systems. The device features two thin membranes that bound a cavity filled with working fluid. The working fluid boils at low temperature. Two sizes of actuator are tested, an actuator with membrane sidelengths of 5 mm and an actuator with top membrane sidelength of 10 mm. Two top membrane materials are explored consisting of 2 μm thick silicon and 300 nm thick silicon nitride. Heat addition is through the lower membrane which is fabricated with novel capillary structures designed to increase the efficiency of actuator operation. The actuator is shown to produce up to 2.6 mW of mechanical power output and generate an applied force of 43 mN. Operating speeds up to 100 Hz are demonstrated. |
| doi_str_mv | 10.1109/JMEMS.2011.2167660 |
| format | Article |
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The actuator is shown to produce up to 2.6 mW of mechanical power output and generate an applied force of 43 mN. Operating speeds up to 100 Hz are demonstrated.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2011.2167660</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Actuator ; Actuators ; Cavity resonators ; Devices ; engine ; Exact sciences and technology ; High speed ; Holes ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Mechanical instruments, equipment and techniques ; Membranes ; Microelectromechanical systems ; microelectromechanical systems (MEMS) ; Micromechanical devices and systems ; Phase change ; Phase change materials ; Physics ; Resistance heating ; Silicon nitride ; Switches ; Working fluids</subject><ispartof>Journal of microelectromechanical systems, 2011-12, Vol.20 (6), p.1287-1297</ispartof><rights>2015 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Dec 2011</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c357t-a17727b357ba18db0319f87e8339eb2f5cf4baa0d34e6cd30d153fdb025736823</citedby><cites>FETCH-LOGICAL-c357t-a17727b357ba18db0319f87e8339eb2f5cf4baa0d34e6cd30d153fdb025736823</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/6033041$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27903,27904,54736</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/6033041$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=25335313$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Weiss, L. W.</creatorcontrib><creatorcontrib>Richards, C. 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Heat addition is through the lower membrane which is fabricated with novel capillary structures designed to increase the efficiency of actuator operation. The actuator is shown to produce up to 2.6 mW of mechanical power output and generate an applied force of 43 mN. Operating speeds up to 100 Hz are demonstrated.</description><subject>Actuator</subject><subject>Actuators</subject><subject>Cavity resonators</subject><subject>Devices</subject><subject>engine</subject><subject>Exact sciences and technology</subject><subject>High speed</subject><subject>Holes</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Membranes</subject><subject>Microelectromechanical systems</subject><subject>microelectromechanical systems (MEMS)</subject><subject>Micromechanical devices and systems</subject><subject>Phase change</subject><subject>Phase change materials</subject><subject>Physics</subject><subject>Resistance heating</subject><subject>Silicon nitride</subject><subject>Switches</subject><subject>Working fluids</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkE1Lw0AQhoMo-PkH9LIIgpfUnZ1sdnPwIKX1g5YK6jlsNhONxKTuJkj_vVtbevA0A_O8D8MbRefARwA8u3maT-YvI8EBRgJSlaZ8LzqCLIGYg9T7YedSxQqkOoyOvf_kHJJEp0fR7XP3Q44thn459GzaOUvsnlpypq-7lhUrZtjazZ4_jCc2_jDtO7E72w-m79xpdFCZxtPZdp5Eb9PJ6_ghni3uH8d3s9iiVH1sQCmhirAXBnRZcISs0oo0YkaFqKStksIYXmJCqS2RlyCxCpyQClMt8CS63niXrvseyPf5V-0tNY1pqRt8Dhy41qg5BPTyH_rZDa4N3-UZoBJaSBkgsYGs67x3VOVLV38ZtwqmfF1o_ldovi403xYaQldbs_HWNJUzra39LikkokTAwF1suJqIducgQJ4A_gK703vB</recordid><startdate>20111201</startdate><enddate>20111201</enddate><creator>Weiss, L. 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F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c357t-a17727b357ba18db0319f87e8339eb2f5cf4baa0d34e6cd30d153fdb025736823</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Actuator</topic><topic>Actuators</topic><topic>Cavity resonators</topic><topic>Devices</topic><topic>engine</topic><topic>Exact sciences and technology</topic><topic>High speed</topic><topic>Holes</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>Membranes</topic><topic>Microelectromechanical systems</topic><topic>microelectromechanical systems (MEMS)</topic><topic>Micromechanical devices and systems</topic><topic>Phase change</topic><topic>Phase change materials</topic><topic>Physics</topic><topic>Resistance heating</topic><topic>Silicon nitride</topic><topic>Switches</topic><topic>Working fluids</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Weiss, L. 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F.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Weiss, L. W.</au><au>Richards, C. D.</au><au>Richards, R. F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Power Output Force Generation by a MEMS Phase Change Actuator</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2011-12-01</date><risdate>2011</risdate><volume>20</volume><issue>6</issue><spage>1287</spage><epage>1297</epage><pages>1287-1297</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>A microelectromechanical-systems-based phase change actuator has been developed and tested for high-speed mechanical power output and force generation. This actuator is well suited for a variety of advanced devices like tactile displays or micro fluidic systems. The device features two thin membranes that bound a cavity filled with working fluid. The working fluid boils at low temperature. 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| identifier | ISSN: 1057-7157 |
| ispartof | Journal of microelectromechanical systems, 2011-12, Vol.20 (6), p.1287-1297 |
| issn | 1057-7157 1941-0158 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Actuator Actuators Cavity resonators Devices engine Exact sciences and technology High speed Holes Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Membranes Microelectromechanical systems microelectromechanical systems (MEMS) Micromechanical devices and systems Phase change Phase change materials Physics Resistance heating Silicon nitride Switches Working fluids |
| title | Power Output Force Generation by a MEMS Phase Change Actuator |
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