High- Q Tunable Microwave Cavity Resonators and Filters Using SOI-Based RF MEMS Tuners

This paper presents the modeling, design, fabrication, and measurement of microelectromechanical systems-enabled continuously tunable evanescent-mode electromagnetic cavity resonators and filters with very high unloaded quality factors (Q u ). Integrated electrostatically actuated thin diaphragms ar...

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Veröffentlicht in:	Journal of microelectromechanical systems 2010-08, Vol.19 (4), p.774-784
Hauptverfasser:	Xiaoguang Liu, Katehi, Linda P B, Chappell, William J, Peroulis, Dimitrios
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Bias Cavity resonators Circuit properties Drift Electric potential Electric, optical and optoelectronic circuits Electromagnetic measurements Electromagnetic modeling Electronics Electrostatic actuation Electrostatic measurements evanescent-mode cavity Exact sciences and technology Fabrication Insertion loss Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Microelectromechanical systems microelectromechanical systems (MEMS) Micromechanical devices and systems Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Noise levels Physics Q factor Q measurement quality factor Resonant frequency Resonator filters Resonators tunable filter tunable resonator Tuning
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