Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators

This paper presents the design, modeling, fabrication, and characterization of CMOS microelectromechanical-systems-based thermoelectric power generators (TPGs) to convert waste heat into a few microwatts of electrical power. Phosphorus and boron heavily doped polysilicon thin films are patterned and...

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