Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz Method

Microsystem development requires accurate and parametric-based modeling as well as experimental validation of the effects of multiphysics influences such as electrostatic, thermal, and mechanical on microsystems in a systematic manner. This work attempts to synthesize the influence of electrothermom...

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Veröffentlicht in:	Journal of microelectromechanical systems 2008-12, Vol.17 (6), p.1468-1480
Hauptverfasser:	Rinaldi, G., Packirisamy, M., Stiharu, I.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Artificial springs Biomedical optical imaging Boundaries Design optimization dynamic analysis Dynamic tests Dynamics Electrostatics Electrothermal effects Exact sciences and technology Geometrical optics Instruments, apparatus, components and techniques common to several branches of physics and astronomy laser Doppler velocimetry Mathematical models Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Micromechanical devices and systems Microstructure microsystem synthesis multiphysics environment Nonuniform Optical attenuators Optical sensors Optical waveguides Physics Precision engineering, watch making segment Rayleigh-Ritz (SRR) Segments Springs Studies Synthesis Testing Tuning
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