Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz Method
Microsystem development requires accurate and parametric-based modeling as well as experimental validation of the effects of multiphysics influences such as electrostatic, thermal, and mechanical on microsystems in a systematic manner. This work attempts to synthesize the influence of electrothermom...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2008-12, Vol.17 (6), p.1468-1480 |
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| creator | Rinaldi, G. Packirisamy, M. Stiharu, I. |
| description | Microsystem development requires accurate and parametric-based modeling as well as experimental validation of the effects of multiphysics influences such as electrostatic, thermal, and mechanical on microsystems in a systematic manner. This work attempts to synthesize the influence of electrothermomechanical influences on microsystems using an energy-based method, namely, the segment Rayleigh-Ritz (SRR), thereby making it possible to study the multiphysics influences on the dynamic behavior of microsystems in a simplified and unified way. Electrostatic, thermal, and geometrical influences along with microfabrication limitations related to the boundary support are studied on cantilever-based microsystems. Silicon-on-insulator-based technology is used for demonstration purposes. The SRR energy method was developed in order to improve the theoretical formulation for microsystems with nonuniform properties. The method of artificial springs is employed to model the boundary support, electrostatic influences, and intersegmental boundaries. The microfabricated support conditions were quantified through a rotational stiffness, and its invariance with geometry, temperature, and electrostatic field was verified through dynamic testing under electrothermal influences. Comparison with test results validates the dynamic synthesis modeling for microstructures. This approach can be expanded further to nondimensional design optimization and for targeted performance tuning of the static and dynamic behavior of microsystems. |
| doi_str_mv | 10.1109/JMEMS.2008.2004952 |
| format | Article |
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This work attempts to synthesize the influence of electrothermomechanical influences on microsystems using an energy-based method, namely, the segment Rayleigh-Ritz (SRR), thereby making it possible to study the multiphysics influences on the dynamic behavior of microsystems in a simplified and unified way. Electrostatic, thermal, and geometrical influences along with microfabrication limitations related to the boundary support are studied on cantilever-based microsystems. Silicon-on-insulator-based technology is used for demonstration purposes. The SRR energy method was developed in order to improve the theoretical formulation for microsystems with nonuniform properties. The method of artificial springs is employed to model the boundary support, electrostatic influences, and intersegmental boundaries. The microfabricated support conditions were quantified through a rotational stiffness, and its invariance with geometry, temperature, and electrostatic field was verified through dynamic testing under electrothermal influences. Comparison with test results validates the dynamic synthesis modeling for microstructures. This approach can be expanded further to nondimensional design optimization and for targeted performance tuning of the static and dynamic behavior of microsystems.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2008.2004952</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Artificial springs ; Biomedical optical imaging ; Boundaries ; Design optimization ; dynamic analysis ; Dynamic tests ; Dynamics ; Electrostatics ; Electrothermal effects ; Exact sciences and technology ; Geometrical optics ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; laser Doppler velocimetry ; Mathematical models ; Mechanical engineering. Machine design ; Mechanical instruments, equipment and techniques ; Micromechanical devices and systems ; Microstructure ; microsystem synthesis ; multiphysics environment ; Nonuniform ; Optical attenuators ; Optical sensors ; Optical waveguides ; Physics ; Precision engineering, watch making ; segment Rayleigh-Ritz (SRR) ; Segments ; Springs ; Studies ; Synthesis ; Testing ; Tuning</subject><ispartof>Journal of microelectromechanical systems, 2008-12, Vol.17 (6), p.1468-1480</ispartof><rights>2009 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2008</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c452t-900e4278a1254f3b6831d1528da9db89aaca6c89a1c328411391d0720561370c3</citedby><cites>FETCH-LOGICAL-c452t-900e4278a1254f3b6831d1528da9db89aaca6c89a1c328411391d0720561370c3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4663116$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27903,27904,54736</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4663116$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=21107490$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Rinaldi, G.</creatorcontrib><creatorcontrib>Packirisamy, M.</creatorcontrib><creatorcontrib>Stiharu, I.</creatorcontrib><title>Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz Method</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>Microsystem development requires accurate and parametric-based modeling as well as experimental validation of the effects of multiphysics influences such as electrostatic, thermal, and mechanical on microsystems in a systematic manner. This work attempts to synthesize the influence of electrothermomechanical influences on microsystems using an energy-based method, namely, the segment Rayleigh-Ritz (SRR), thereby making it possible to study the multiphysics influences on the dynamic behavior of microsystems in a simplified and unified way. Electrostatic, thermal, and geometrical influences along with microfabrication limitations related to the boundary support are studied on cantilever-based microsystems. Silicon-on-insulator-based technology is used for demonstration purposes. The SRR energy method was developed in order to improve the theoretical formulation for microsystems with nonuniform properties. The method of artificial springs is employed to model the boundary support, electrostatic influences, and intersegmental boundaries. The microfabricated support conditions were quantified through a rotational stiffness, and its invariance with geometry, temperature, and electrostatic field was verified through dynamic testing under electrothermal influences. Comparison with test results validates the dynamic synthesis modeling for microstructures. This approach can be expanded further to nondimensional design optimization and for targeted performance tuning of the static and dynamic behavior of microsystems.</description><subject>Applied sciences</subject><subject>Artificial springs</subject><subject>Biomedical optical imaging</subject><subject>Boundaries</subject><subject>Design optimization</subject><subject>dynamic analysis</subject><subject>Dynamic tests</subject><subject>Dynamics</subject><subject>Electrostatics</subject><subject>Electrothermal effects</subject><subject>Exact sciences and technology</subject><subject>Geometrical optics</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>laser Doppler velocimetry</subject><subject>Mathematical models</subject><subject>Mechanical engineering. Machine design</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Micromechanical devices and systems</subject><subject>Microstructure</subject><subject>microsystem synthesis</subject><subject>multiphysics environment</subject><subject>Nonuniform</subject><subject>Optical attenuators</subject><subject>Optical sensors</subject><subject>Optical waveguides</subject><subject>Physics</subject><subject>Precision engineering, watch making</subject><subject>segment Rayleigh-Ritz (SRR)</subject><subject>Segments</subject><subject>Springs</subject><subject>Studies</subject><subject>Synthesis</subject><subject>Testing</subject><subject>Tuning</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkUtP40AQhC20SMuG_QPLxVppFy4O3fOe44pXQERIZDlbw3icTOQHeJyD-fWMScSBA1y6W-qv6lCVJL8QpoigT2_mF_PFlACocTDNyV5ygJphBsjVt3gDl5lELr8nP0JYAyBjShwks_OhMbW36WJo-pULPqRtmc697dowhN7VIX0Ivlmm8Zku3LJ2TZ_em6FyfrnK7n3_ks5dv2qLw2S_NFVwP3d7kjxcXvw_m2W3d1fXZ_9uM8s46TMN4BiRyiDhrKSPQlEskBNVGF08Km2MNcLGjZYSxRCpxgIkAS6QSrB0khxvfZ-69nnjQp_XPlhXVaZx7SbkGqgglAJ-SSoFgkngPJJ_PyUpYzE-qiJ48imIQIjSmooR_f0BXbebronR5BoJlUwoiBDZQmPcoXNl_tT52nRDdMrHYvO3YvOx2HxXbBT92TmbYE1VdqaxPrwrSdRJpkfzoy3nnXPvbyYERRT0FRSbqG4</recordid><startdate>20081201</startdate><enddate>20081201</enddate><creator>Rinaldi, G.</creator><creator>Packirisamy, M.</creator><creator>Stiharu, I.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope></search><sort><creationdate>20081201</creationdate><title>Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz Method</title><author>Rinaldi, G. ; Packirisamy, M. ; Stiharu, I.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c452t-900e4278a1254f3b6831d1528da9db89aaca6c89a1c328411391d0720561370c3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Applied sciences</topic><topic>Artificial springs</topic><topic>Biomedical optical imaging</topic><topic>Boundaries</topic><topic>Design optimization</topic><topic>dynamic analysis</topic><topic>Dynamic tests</topic><topic>Dynamics</topic><topic>Electrostatics</topic><topic>Electrothermal effects</topic><topic>Exact sciences and technology</topic><topic>Geometrical optics</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>laser Doppler velocimetry</topic><topic>Mathematical models</topic><topic>Mechanical engineering. Machine design</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>Micromechanical devices and systems</topic><topic>Microstructure</topic><topic>microsystem synthesis</topic><topic>multiphysics environment</topic><topic>Nonuniform</topic><topic>Optical attenuators</topic><topic>Optical sensors</topic><topic>Optical waveguides</topic><topic>Physics</topic><topic>Precision engineering, watch making</topic><topic>segment Rayleigh-Ritz (SRR)</topic><topic>Segments</topic><topic>Springs</topic><topic>Studies</topic><topic>Synthesis</topic><topic>Testing</topic><topic>Tuning</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Rinaldi, G.</creatorcontrib><creatorcontrib>Packirisamy, M.</creatorcontrib><creatorcontrib>Stiharu, I.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Xplore Digital Library</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Rinaldi, G.</au><au>Packirisamy, M.</au><au>Stiharu, I.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz Method</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2008-12-01</date><risdate>2008</risdate><volume>17</volume><issue>6</issue><spage>1468</spage><epage>1480</epage><pages>1468-1480</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>Microsystem development requires accurate and parametric-based modeling as well as experimental validation of the effects of multiphysics influences such as electrostatic, thermal, and mechanical on microsystems in a systematic manner. This work attempts to synthesize the influence of electrothermomechanical influences on microsystems using an energy-based method, namely, the segment Rayleigh-Ritz (SRR), thereby making it possible to study the multiphysics influences on the dynamic behavior of microsystems in a simplified and unified way. Electrostatic, thermal, and geometrical influences along with microfabrication limitations related to the boundary support are studied on cantilever-based microsystems. Silicon-on-insulator-based technology is used for demonstration purposes. The SRR energy method was developed in order to improve the theoretical formulation for microsystems with nonuniform properties. The method of artificial springs is employed to model the boundary support, electrostatic influences, and intersegmental boundaries. The microfabricated support conditions were quantified through a rotational stiffness, and its invariance with geometry, temperature, and electrostatic field was verified through dynamic testing under electrothermal influences. Comparison with test results validates the dynamic synthesis modeling for microstructures. This approach can be expanded further to nondimensional design optimization and for targeted performance tuning of the static and dynamic behavior of microsystems.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2008.2004952</doi><tpages>13</tpages></addata></record> |
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| subjects | Applied sciences Artificial springs Biomedical optical imaging Boundaries Design optimization dynamic analysis Dynamic tests Dynamics Electrostatics Electrothermal effects Exact sciences and technology Geometrical optics Instruments, apparatus, components and techniques common to several branches of physics and astronomy laser Doppler velocimetry Mathematical models Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Micromechanical devices and systems Microstructure microsystem synthesis multiphysics environment Nonuniform Optical attenuators Optical sensors Optical waveguides Physics Precision engineering, watch making segment Rayleigh-Ritz (SRR) Segments Springs Studies Synthesis Testing Tuning |
| title | Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz Method |
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