A MEMS Singlet Oxygen Generator-Part I: Device Fabrication and Proof of Concept Demonstration

This paper reports the design, fabrication, and proof of concept demonstration of a singlet oxygen generator (SOG) that operates on the microscale. The micro-SOG (muSOG) chip is implemented in a three-wafer stack using deep reactive ion etching (DRIE) and wafer bonding as key technologies. The devic...

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Veröffentlicht in:	Journal of microelectromechanical systems 2007-12, Vol.16 (6), p.1482-1491
Hauptverfasser:	Velasquez-Garcia, L.F., Hill, T.F., Wilhite, B.A., Jensen, K.F., Epstein, A.H., Livermore, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Arrays Byproducts Channels Chemical oxygen-iodine laser (COIL) deep reactive ion etching (DRIE) Design engineering Devices Electronic ballasts Etching Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Heat exchangers Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques microfluidics Micromechanical devices Micromechanical devices and systems Optical device fabrication Optical devices Optical losses Oxygen Packages Packaging Physics Precision engineering, watch making Proving Singlet oxygen Stimulated emission Wafer bonding
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