A high-power MEMS electric induction motor
An electric induction micromotor with a 4-mm-diameter rotor was designed and built for high-power operation. Operated at partial actuating voltage, the motor has demonstrated an air gap power in excess of 20 mW and torque of 3.5 /spl mu/Nm at speeds in excess of 55 000 rpm. Operation at higher power...
Gespeichert in:
| Veröffentlicht in: | Journal of microelectromechanical systems 2004-06, Vol.13 (3), p.465-471 |
|---|---|
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 471 |
|---|---|
| container_issue | 3 |
| container_start_page | 465 |
| container_title | Journal of microelectromechanical systems |
| container_volume | 13 |
| creator | Livermore, C. Forte, A.R. Lyszczarz, T. Umans, S.D. Ayon, A.A. Lang, J.H. |
| description | An electric induction micromotor with a 4-mm-diameter rotor was designed and built for high-power operation. Operated at partial actuating voltage, the motor has demonstrated an air gap power in excess of 20 mW and torque of 3.5 /spl mu/Nm at speeds in excess of 55 000 rpm. Operation at higher power and speed was limited by bearing stability at higher rotational speeds. The device builds on an earlier micromotor demonstrated by Frechette et al. The high power of the present motor is enabled by its low-loss, high-voltage electric stator, which also offers improved efficiency. The development of this electromechanical device is an important enabling step not only for watt-scale micromotors, but also for the development of microelectric generators. This paper presents the motor's design, the fabrication process that was created to meet its stringent design requirements, and its performance to date. |
| doi_str_mv | 10.1109/JMEMS.2004.828736 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_crossref_primary_10_1109_JMEMS_2004_828736</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>1303624</ieee_id><sourcerecordid>28338327</sourcerecordid><originalsourceid>FETCH-LOGICAL-c353t-1b5ce432f22c0bbf5142992fdc656d9ae8a2b97aaf7d4c1ff6175ef1d546fc63</originalsourceid><addsrcrecordid>eNp9kEtLAzEUhYMoWKs_QNwMLhSEqbl5ZymlvmhxYfdhJpPYKdNJTWYQ_71TKwguXN2z-M6B-yF0DngCgPXt82K2eJ0QjNlEESWpOEAj0AxyDFwdDhlzmUvg8hidpLTGGBhTYoRu7rJV_bbKt-HDxWw3krnG2S7WNqvbqrddHdpsE7oQT9GRL5rkzn7uGC3vZ8vpYz5_eXia3s1zSzntcii5dYwST4jFZek5MKI18ZUVXFS6cKogpZZF4WXFLHgvQHLnoeJMeCvoGF3vZ7cxvPcudWZTJ-uapmhd6JPRGIQATclAXv1LEkWpokQO4OUfcB362A5PGE2wUgxrPUCwh2wMKUXnzTbWmyJ-GsBm59h8OzY7x2bveOhc7Du1c-6Xp5gKwugX52V2LQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>920884099</pqid></control><display><type>article</type><title>A high-power MEMS electric induction motor</title><source>IEEE Electronic Library (IEL)</source><creator>Livermore, C. ; Forte, A.R. ; Lyszczarz, T. ; Umans, S.D. ; Ayon, A.A. ; Lang, J.H.</creator><creatorcontrib>Livermore, C. ; Forte, A.R. ; Lyszczarz, T. ; Umans, S.D. ; Ayon, A.A. ; Lang, J.H.</creatorcontrib><description>An electric induction micromotor with a 4-mm-diameter rotor was designed and built for high-power operation. Operated at partial actuating voltage, the motor has demonstrated an air gap power in excess of 20 mW and torque of 3.5 /spl mu/Nm at speeds in excess of 55 000 rpm. Operation at higher power and speed was limited by bearing stability at higher rotational speeds. The device builds on an earlier micromotor demonstrated by Frechette et al. The high power of the present motor is enabled by its low-loss, high-voltage electric stator, which also offers improved efficiency. The development of this electromechanical device is an important enabling step not only for watt-scale micromotors, but also for the development of microelectric generators. This paper presents the motor's design, the fabrication process that was created to meet its stringent design requirements, and its performance to date.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2004.828736</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Construction ; Design engineering ; Devices ; Electric power generation ; Electromechanical devices ; Induction motors ; Microelectromechanical systems ; Micromechanical devices ; Micromotors ; Motors ; Process design ; Rotors ; Stability ; Stators ; Torque ; Voltage</subject><ispartof>Journal of microelectromechanical systems, 2004-06, Vol.13 (3), p.465-471</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2004</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c353t-1b5ce432f22c0bbf5142992fdc656d9ae8a2b97aaf7d4c1ff6175ef1d546fc63</citedby><cites>FETCH-LOGICAL-c353t-1b5ce432f22c0bbf5142992fdc656d9ae8a2b97aaf7d4c1ff6175ef1d546fc63</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1303624$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>315,781,785,797,27928,27929,54762</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1303624$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Livermore, C.</creatorcontrib><creatorcontrib>Forte, A.R.</creatorcontrib><creatorcontrib>Lyszczarz, T.</creatorcontrib><creatorcontrib>Umans, S.D.</creatorcontrib><creatorcontrib>Ayon, A.A.</creatorcontrib><creatorcontrib>Lang, J.H.</creatorcontrib><title>A high-power MEMS electric induction motor</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>An electric induction micromotor with a 4-mm-diameter rotor was designed and built for high-power operation. Operated at partial actuating voltage, the motor has demonstrated an air gap power in excess of 20 mW and torque of 3.5 /spl mu/Nm at speeds in excess of 55 000 rpm. Operation at higher power and speed was limited by bearing stability at higher rotational speeds. The device builds on an earlier micromotor demonstrated by Frechette et al. The high power of the present motor is enabled by its low-loss, high-voltage electric stator, which also offers improved efficiency. The development of this electromechanical device is an important enabling step not only for watt-scale micromotors, but also for the development of microelectric generators. This paper presents the motor's design, the fabrication process that was created to meet its stringent design requirements, and its performance to date.</description><subject>Construction</subject><subject>Design engineering</subject><subject>Devices</subject><subject>Electric power generation</subject><subject>Electromechanical devices</subject><subject>Induction motors</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Micromotors</subject><subject>Motors</subject><subject>Process design</subject><subject>Rotors</subject><subject>Stability</subject><subject>Stators</subject><subject>Torque</subject><subject>Voltage</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2004</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kEtLAzEUhYMoWKs_QNwMLhSEqbl5ZymlvmhxYfdhJpPYKdNJTWYQ_71TKwguXN2z-M6B-yF0DngCgPXt82K2eJ0QjNlEESWpOEAj0AxyDFwdDhlzmUvg8hidpLTGGBhTYoRu7rJV_bbKt-HDxWw3krnG2S7WNqvbqrddHdpsE7oQT9GRL5rkzn7uGC3vZ8vpYz5_eXia3s1zSzntcii5dYwST4jFZek5MKI18ZUVXFS6cKogpZZF4WXFLHgvQHLnoeJMeCvoGF3vZ7cxvPcudWZTJ-uapmhd6JPRGIQATclAXv1LEkWpokQO4OUfcB362A5PGE2wUgxrPUCwh2wMKUXnzTbWmyJ-GsBm59h8OzY7x2bveOhc7Du1c-6Xp5gKwugX52V2LQ</recordid><startdate>20040601</startdate><enddate>20040601</enddate><creator>Livermore, C.</creator><creator>Forte, A.R.</creator><creator>Lyszczarz, T.</creator><creator>Umans, S.D.</creator><creator>Ayon, A.A.</creator><creator>Lang, J.H.</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope></search><sort><creationdate>20040601</creationdate><title>A high-power MEMS electric induction motor</title><author>Livermore, C. ; Forte, A.R. ; Lyszczarz, T. ; Umans, S.D. ; Ayon, A.A. ; Lang, J.H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c353t-1b5ce432f22c0bbf5142992fdc656d9ae8a2b97aaf7d4c1ff6175ef1d546fc63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2004</creationdate><topic>Construction</topic><topic>Design engineering</topic><topic>Devices</topic><topic>Electric power generation</topic><topic>Electromechanical devices</topic><topic>Induction motors</topic><topic>Microelectromechanical systems</topic><topic>Micromechanical devices</topic><topic>Micromotors</topic><topic>Motors</topic><topic>Process design</topic><topic>Rotors</topic><topic>Stability</topic><topic>Stators</topic><topic>Torque</topic><topic>Voltage</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Livermore, C.</creatorcontrib><creatorcontrib>Forte, A.R.</creatorcontrib><creatorcontrib>Lyszczarz, T.</creatorcontrib><creatorcontrib>Umans, S.D.</creatorcontrib><creatorcontrib>Ayon, A.A.</creatorcontrib><creatorcontrib>Lang, J.H.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Livermore, C.</au><au>Forte, A.R.</au><au>Lyszczarz, T.</au><au>Umans, S.D.</au><au>Ayon, A.A.</au><au>Lang, J.H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A high-power MEMS electric induction motor</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2004-06-01</date><risdate>2004</risdate><volume>13</volume><issue>3</issue><spage>465</spage><epage>471</epage><pages>465-471</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>An electric induction micromotor with a 4-mm-diameter rotor was designed and built for high-power operation. Operated at partial actuating voltage, the motor has demonstrated an air gap power in excess of 20 mW and torque of 3.5 /spl mu/Nm at speeds in excess of 55 000 rpm. Operation at higher power and speed was limited by bearing stability at higher rotational speeds. The device builds on an earlier micromotor demonstrated by Frechette et al. The high power of the present motor is enabled by its low-loss, high-voltage electric stator, which also offers improved efficiency. The development of this electromechanical device is an important enabling step not only for watt-scale micromotors, but also for the development of microelectric generators. This paper presents the motor's design, the fabrication process that was created to meet its stringent design requirements, and its performance to date.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2004.828736</doi><tpages>7</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1057-7157 |
| ispartof | Journal of microelectromechanical systems, 2004-06, Vol.13 (3), p.465-471 |
| issn | 1057-7157 1941-0158 |
| language | eng |
| recordid | cdi_crossref_primary_10_1109_JMEMS_2004_828736 |
| source | IEEE Electronic Library (IEL) |
| subjects | Construction Design engineering Devices Electric power generation Electromechanical devices Induction motors Microelectromechanical systems Micromechanical devices Micromotors Motors Process design Rotors Stability Stators Torque Voltage |
| title | A high-power MEMS electric induction motor |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-17T06%3A45%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20high-power%20MEMS%20electric%20induction%20motor&rft.jtitle=Journal%20of%20microelectromechanical%20systems&rft.au=Livermore,%20C.&rft.date=2004-06-01&rft.volume=13&rft.issue=3&rft.spage=465&rft.epage=471&rft.pages=465-471&rft.issn=1057-7157&rft.eissn=1941-0158&rft.coden=JMIYET&rft_id=info:doi/10.1109/JMEMS.2004.828736&rft_dat=%3Cproquest_RIE%3E28338327%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=920884099&rft_id=info:pmid/&rft_ieee_id=1303624&rfr_iscdi=true |