DC Electroluminescence Efficiency of Silicon Rich Silicon Oxide Light Emitting Capacitors

We analyze the influence of the fabrication technique and the silicon excess on the power efficiency and evolution with time of the electroluminescence of silicon rich silicon oxide in metal-oxide-semiconductor like light emitting capacitors under direct current. The silicon rich silicon oxide layer...

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Veröffentlicht in:Journal of lightwave technology 2013-09, Vol.31 (17), p.2913-2918
Hauptverfasser: Juvert, Joan, Gonzalez Fernandez, Alfredo Abelardo, Morales-Sanchez, Alfredo, Barreto, Jorge, Aceves, Mariano, Llobera, Andreu, Dominguez, Carlos
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container_end_page 2918
container_issue 17
container_start_page 2913
container_title Journal of lightwave technology
container_volume 31
creator Juvert, Joan
Gonzalez Fernandez, Alfredo Abelardo
Morales-Sanchez, Alfredo
Barreto, Jorge
Aceves, Mariano
Llobera, Andreu
Dominguez, Carlos
description We analyze the influence of the fabrication technique and the silicon excess on the power efficiency and evolution with time of the electroluminescence of silicon rich silicon oxide in metal-oxide-semiconductor like light emitting capacitors under direct current. The silicon rich silicon oxide layers have been fabricated using two different techniques, namely plasma enhanced chemical vapor deposition and silicon ion implantation. Six different silicon excesses have been studied, ranging from 6 at. % to 15 at. %. It is shown that both the power efficiency and external quantum efficiency increase with the silicon excess due to a decrease in the electroluminescence current threshold. The maximum value of the power efficiency has been found to be (2.6±0.3)×10 -5 in the ion implanted sample with 15 at. % silicon excess. Significant differences in the evolution of the electroluminescence with time are found depending on the fabrication technique.
doi_str_mv 10.1109/JLT.2013.2276435
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The silicon rich silicon oxide layers have been fabricated using two different techniques, namely plasma enhanced chemical vapor deposition and silicon ion implantation. Six different silicon excesses have been studied, ranging from 6 at. % to 15 at. %. It is shown that both the power efficiency and external quantum efficiency increase with the silicon excess due to a decrease in the electroluminescence current threshold. The maximum value of the power efficiency has been found to be (2.6±0.3)×10 -5 in the ion implanted sample with 15 at. % silicon excess. 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The silicon rich silicon oxide layers have been fabricated using two different techniques, namely plasma enhanced chemical vapor deposition and silicon ion implantation. Six different silicon excesses have been studied, ranging from 6 at. % to 15 at. %. It is shown that both the power efficiency and external quantum efficiency increase with the silicon excess due to a decrease in the electroluminescence current threshold. The maximum value of the power efficiency has been found to be (2.6±0.3)×10 -5 in the ion implanted sample with 15 at. % silicon excess. Significant differences in the evolution of the electroluminescence with time are found depending on the fabrication technique.</description><subject>Applied sciences</subject><subject>Current density</subject><subject>Detectors</subject><subject>Electroluminescence</subject><subject>electroluminescent devices</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Fabrication</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>MIS devices</subject><subject>nanoparticles</subject><subject>nanostructured materials</subject><subject>Optical variables measurement</subject><subject>Optoelectronic devices</subject><subject>Sea measurements</subject><subject>semiconductor devices</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. 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The silicon rich silicon oxide layers have been fabricated using two different techniques, namely plasma enhanced chemical vapor deposition and silicon ion implantation. Six different silicon excesses have been studied, ranging from 6 at. % to 15 at. %. It is shown that both the power efficiency and external quantum efficiency increase with the silicon excess due to a decrease in the electroluminescence current threshold. The maximum value of the power efficiency has been found to be (2.6±0.3)×10 -5 in the ion implanted sample with 15 at. % silicon excess. Significant differences in the evolution of the electroluminescence with time are found depending on the fabrication technique.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JLT.2013.2276435</doi><tpages>6</tpages></addata></record>
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source IEEE Electronic Library (IEL)
subjects Applied sciences
Current density
Detectors
Electroluminescence
electroluminescent devices
Electronics
Exact sciences and technology
Fabrication
Microelectronic fabrication (materials and surfaces technology)
MIS devices
nanoparticles
nanostructured materials
Optical variables measurement
Optoelectronic devices
Sea measurements
semiconductor devices
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Services and terminals of telecommunications
Silicon
silicon devices
Systems, networks and services of telecommunications
Telecommunications
Telecommunications and information theory
Telemetry. Remote supervision. Telewarning. Remote control
title DC Electroluminescence Efficiency of Silicon Rich Silicon Oxide Light Emitting Capacitors
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