Use of Nanosecond Laser Annealing for Thermally Stable Ni(GeSn) Alloys

In this study, we have conclusively used UV-nanosecond laser annealing (UV-NLA) as an alternative to classical rapid thermal annealing (RTA) for the formation of stable Ni-GeSn alloys. The phase formation sequence was similar to the one obtained with RTA. At low laser energy densities (ED) and after...

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Veröffentlicht in:	IEEE journal of the Electron Devices Society 2023, Vol.11, p.687-694
Hauptverfasser:	Quintero, Andrea, Alba, Pablo Acosta, Hartmann, Jean-Michel, Cooper, David, Gergaud, Patrice, Reboud, Vincent, Rodriguez, Philippe
Format:	Artikel
Sprache:	eng
Schlagworte:	contact Diffraction Germanium GeSn Intermetallic compounds laser annealing Laser beam annealing Metals Nickel NiGeSn Surface emitting lasers Thermal stability X-ray scattering
Online-Zugang:	Volltext
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