Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating
We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substra...
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| Veröffentlicht in: | IEEE access 2019, Vol.7, p.42201-42209 |
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| creator | Lee, Hanju Baghdasaryan, Zhirayr Friedman, Barry Lee, Kiejin |
| description | We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ~ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect of a transparent conductive thin film with a minimum detectable defect length of 1 mm and a parallel sensing of electrical defects distributed in a 40 mm by 30 mm area. The high resolution and wide field of view of the present method are attractive features for the practical application of this inspection technology. |
| doi_str_mv | 10.1109/ACCESS.2019.2907013 |
| format | Article |
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The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ~ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect of a transparent conductive thin film with a minimum detectable defect length of 1 mm and a parallel sensing of electrical defects distributed in a 40 mm by 30 mm area. The high resolution and wide field of view of the present method are attractive features for the practical application of this inspection technology.</description><identifier>ISSN: 2169-3536</identifier><identifier>EISSN: 2169-3536</identifier><identifier>DOI: 10.1109/ACCESS.2019.2907013</identifier><identifier>CODEN: IAECCG</identifier><language>eng</language><publisher>Piscataway: IEEE</publisher><subject>defect detection ; Electric contacts ; Electromagnetic heating ; Field of view ; Glass ; Glass substrates ; Heating ; Indium tin oxide ; Indium tin oxides ; Inspection ; Microwave heating ; Microwave imaging ; Microwave theory and techniques ; optical inspection technology ; Optical microscopes ; Optical polarization ; Optical waveguides ; Stress concentration ; Stress distribution ; Thermal stress ; Thin films</subject><ispartof>IEEE access, 2019, Vol.7, p.42201-42209</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2019</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c408t-2181b4d48376de12d9a1a499bfb58026b2a472a80d7927364bd48a276d3a90233</citedby><cites>FETCH-LOGICAL-c408t-2181b4d48376de12d9a1a499bfb58026b2a472a80d7927364bd48a276d3a90233</cites><orcidid>0000-0001-5267-9586</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/8672863$$EHTML$$P50$$Gieee$$Hfree_for_read</linktohtml><link.rule.ids>314,776,780,860,2096,4010,27610,27900,27901,27902,54908</link.rule.ids></links><search><creatorcontrib>Lee, Hanju</creatorcontrib><creatorcontrib>Baghdasaryan, Zhirayr</creatorcontrib><creatorcontrib>Friedman, Barry</creatorcontrib><creatorcontrib>Lee, Kiejin</creatorcontrib><title>Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating</title><title>IEEE access</title><addtitle>Access</addtitle><description>We present a new optical method for the electrical defect inspection for indium tin oxide (ITO) thin film on a glass substrate. The present method is based on the visualization of the microwave heating distribution around an electrical defect from the thermal stress distribution of the glass substrate of ITO-glass. By using a conventional polarized microscope with microwave irradiation (6 ~ 15 GHz), we show that the present method provides a non-contact and non-destructive way to inspect an electrical defect of a transparent conductive thin film with a minimum detectable defect length of 1 mm and a parallel sensing of electrical defects distributed in a 40 mm by 30 mm area. The high resolution and wide field of view of the present method are attractive features for the practical application of this inspection technology.</description><subject>defect detection</subject><subject>Electric contacts</subject><subject>Electromagnetic heating</subject><subject>Field of view</subject><subject>Glass</subject><subject>Glass substrates</subject><subject>Heating</subject><subject>Indium tin oxide</subject><subject>Indium tin oxides</subject><subject>Inspection</subject><subject>Microwave heating</subject><subject>Microwave imaging</subject><subject>Microwave theory and techniques</subject><subject>optical inspection technology</subject><subject>Optical microscopes</subject><subject>Optical polarization</subject><subject>Optical waveguides</subject><subject>Stress concentration</subject><subject>Stress distribution</subject><subject>Thermal stress</subject><subject>Thin films</subject><issn>2169-3536</issn><issn>2169-3536</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><sourceid>ESBDL</sourceid><sourceid>RIE</sourceid><sourceid>DOA</sourceid><recordid>eNpNkUtLAzEUhQdRULS_oJuA69a8H0sZqx1QumhFcBPuZDJ1ymhqZlT67007UswmN5fvnHvJybIxwVNCsLm5zfPZcjmlmJgpNVhhwk6yC0qkmTDB5Om_-jwbdd0Gp6NTS6iL7HXWetfHxkGL7nydalS8w7r5WKNQo2K1QHmA3lfooYWuQ-UOLbb9gX5qXAydC1uPXpr-bXj_wLdHcw99MrjKzmpoOz_6uy-z5_vZKp9PHhcPRX77OHEc635CiSYlr7hmSlae0MoAAW5MWZdCYypLClxR0LhShiomeZlYoAlmYDBl7DIrBt8qwMZuY_MOcWcDNPbQCHFtIaadW2-pA-k8CCrAcFXJ0ilBOHGurqnTwiWv68FrG8Pnl-96uwlf8SOtbykXQjKlmEoUG6j9D3TR18epBNt9JnbIxO4zsX-ZJNV4UDXe-6NCS0W1ZOwXOi2F9A</recordid><startdate>2019</startdate><enddate>2019</enddate><creator>Lee, Hanju</creator><creator>Baghdasaryan, Zhirayr</creator><creator>Friedman, Barry</creator><creator>Lee, Kiejin</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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| source | Directory of Open Access Journals; IEEE Xplore Open Access Journals; EZB Electronic Journals Library |
| subjects | defect detection Electric contacts Electromagnetic heating Field of view Glass Glass substrates Heating Indium tin oxide Indium tin oxides Inspection Microwave heating Microwave imaging Microwave theory and techniques optical inspection technology Optical microscopes Optical polarization Optical waveguides Stress concentration Stress distribution Thermal stress Thin films |
| title | Electrical Defect Imaging of ITO Coated Glass by Optical Microscope With Microwave Heating |
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