Piezoelectric micromotors for microrobots
The authors have begun research into piezoelectric ultrasonic motors using ferroelectric thin films. The authors have fabricated the stator components of these millimeter diameter motors on silicon wafers. Ultrasonic motors consist of two pieces: a stator and a rotor. The stator includes a piezoelec...
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| Veröffentlicht in: | Journal of microelectromechanical systems 1992-03, Vol.1 (1), p.44-51 |
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| container_end_page | 51 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Flynn, A.M. Tavrow, L.S. Bart, S.F. Brooks, R.A. Ehrlich, D.J. Udayakumar, K.R. Cross, L.E. |
| description | The authors have begun research into piezoelectric ultrasonic motors using ferroelectric thin films. The authors have fabricated the stator components of these millimeter diameter motors on silicon wafers. Ultrasonic motors consist of two pieces: a stator and a rotor. The stator includes a piezoelectric film in which bending is induced in the form of a traveling wave. A small glass lens placed upon the stator becomes the spinning rotor. Piezoelectric micromotors overcome the problems currently associated with electrostatic micromotors such as low torque, friction, and the need for high voltage excitation. More importantly, they may offer a much simpler mechanism for coupling power out. Using thin films of lead zirconate titanate on silicon nitride membranes, various types of actuator structures can be fabricated. By combined new robot control systems with piezoelectric motors and micromechanics, the authors propose creating micromechanical systems that are small, cheap and completely autonomous.< > |
| doi_str_mv | 10.1109/84.128055 |
| format | Article |
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The authors have fabricated the stator components of these millimeter diameter motors on silicon wafers. Ultrasonic motors consist of two pieces: a stator and a rotor. The stator includes a piezoelectric film in which bending is induced in the form of a traveling wave. A small glass lens placed upon the stator becomes the spinning rotor. Piezoelectric micromotors overcome the problems currently associated with electrostatic micromotors such as low torque, friction, and the need for high voltage excitation. More importantly, they may offer a much simpler mechanism for coupling power out. Using thin films of lead zirconate titanate on silicon nitride membranes, various types of actuator structures can be fabricated. 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The authors have fabricated the stator components of these millimeter diameter motors on silicon wafers. Ultrasonic motors consist of two pieces: a stator and a rotor. The stator includes a piezoelectric film in which bending is induced in the form of a traveling wave. A small glass lens placed upon the stator becomes the spinning rotor. Piezoelectric micromotors overcome the problems currently associated with electrostatic micromotors such as low torque, friction, and the need for high voltage excitation. More importantly, they may offer a much simpler mechanism for coupling power out. Using thin films of lead zirconate titanate on silicon nitride membranes, various types of actuator structures can be fabricated. By combined new robot control systems with piezoelectric motors and micromechanics, the authors propose creating micromechanical systems that are small, cheap and completely autonomous.< ></description><subject>Applied sciences</subject><subject>Computer science; control theory; systems</subject><subject>Control theory. Systems</subject><subject>Electrical engineering. Electrical power engineering</subject><subject>Electrical machines</subject><subject>Electrostatics</subject><subject>Exact sciences and technology</subject><subject>Ferroelectric materials</subject><subject>Glass</subject><subject>Lenses</subject><subject>Micromotors</subject><subject>Piezoelectric films</subject><subject>Robotics</subject><subject>Rotors</subject><subject>Silicon</subject><subject>Special rotating machines</subject><subject>Spinning</subject><subject>Stators</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1992</creationdate><recordtype>article</recordtype><recordid>eNpFkEtLAzEQgIMoWKsHr556EKGHrTPZJJs9SvEFBT3oOSRxApHdpibtQX-9W7YoDMyDbz6GYewSYYEI7a0WC-QapDxiE2wFVoBSHw81yKZqUDan7KyUTwAUQqsJm79G-knUkd_m6Gd99Dn1aZtymYWUxz4nl7blnJ0E2xW6OOQpe3-4f1s-VauXx-fl3aryXCpZeQVDqA-vglJaOEGBi2GA3tfSOxeUhda1lsA5USsQglDXnGqsseVa11N2M3o3OX3tqGxNH4unrrNrSrtiuJZaqqYdwPkIDieWkimYTY69zd8GweyfYbQw4zMG9vogtcXbLmS79rH8LUjFhYA9djVikYj-daPjF9cHZPM</recordid><startdate>19920301</startdate><enddate>19920301</enddate><creator>Flynn, A.M.</creator><creator>Tavrow, L.S.</creator><creator>Bart, S.F.</creator><creator>Brooks, R.A.</creator><creator>Ehrlich, D.J.</creator><creator>Udayakumar, K.R.</creator><creator>Cross, L.E.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope></search><sort><creationdate>19920301</creationdate><title>Piezoelectric micromotors for microrobots</title><author>Flynn, A.M. ; Tavrow, L.S. ; Bart, S.F. ; Brooks, R.A. ; Ehrlich, D.J. ; Udayakumar, K.R. ; Cross, L.E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c2565-c60c606dc6f6684b4ef246061cc35cbbf6a09b9ae0bb436044e1832e313192883</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1992</creationdate><topic>Applied sciences</topic><topic>Computer science; control theory; systems</topic><topic>Control theory. Systems</topic><topic>Electrical engineering. Electrical power engineering</topic><topic>Electrical machines</topic><topic>Electrostatics</topic><topic>Exact sciences and technology</topic><topic>Ferroelectric materials</topic><topic>Glass</topic><topic>Lenses</topic><topic>Micromotors</topic><topic>Piezoelectric films</topic><topic>Robotics</topic><topic>Rotors</topic><topic>Silicon</topic><topic>Special rotating machines</topic><topic>Spinning</topic><topic>Stators</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Flynn, A.M.</creatorcontrib><creatorcontrib>Tavrow, L.S.</creatorcontrib><creatorcontrib>Bart, S.F.</creatorcontrib><creatorcontrib>Brooks, R.A.</creatorcontrib><creatorcontrib>Ehrlich, D.J.</creatorcontrib><creatorcontrib>Udayakumar, K.R.</creatorcontrib><creatorcontrib>Cross, L.E.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Flynn, A.M.</au><au>Tavrow, L.S.</au><au>Bart, S.F.</au><au>Brooks, R.A.</au><au>Ehrlich, D.J.</au><au>Udayakumar, K.R.</au><au>Cross, L.E.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Piezoelectric micromotors for microrobots</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>1992-03-01</date><risdate>1992</risdate><volume>1</volume><issue>1</issue><spage>44</spage><epage>51</epage><pages>44-51</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>The authors have begun research into piezoelectric ultrasonic motors using ferroelectric thin films. The authors have fabricated the stator components of these millimeter diameter motors on silicon wafers. Ultrasonic motors consist of two pieces: a stator and a rotor. The stator includes a piezoelectric film in which bending is induced in the form of a traveling wave. A small glass lens placed upon the stator becomes the spinning rotor. Piezoelectric micromotors overcome the problems currently associated with electrostatic micromotors such as low torque, friction, and the need for high voltage excitation. More importantly, they may offer a much simpler mechanism for coupling power out. Using thin films of lead zirconate titanate on silicon nitride membranes, various types of actuator structures can be fabricated. By combined new robot control systems with piezoelectric motors and micromechanics, the authors propose creating micromechanical systems that are small, cheap and completely autonomous.< ></abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/84.128055</doi><tpages>8</tpages><oa>free_for_read</oa></addata></record> |
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| ispartof | Journal of microelectromechanical systems, 1992-03, Vol.1 (1), p.44-51 |
| issn | 1057-7157 1941-0158 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Applied sciences Computer science control theory systems Control theory. Systems Electrical engineering. Electrical power engineering Electrical machines Electrostatics Exact sciences and technology Ferroelectric materials Glass Lenses Micromotors Piezoelectric films Robotics Rotors Silicon Special rotating machines Spinning Stators |
| title | Piezoelectric micromotors for microrobots |
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