Fabrication and characterization of superconducting X-ray calorimeters with transition edge sensors

We have developed superconducting calorimeters using transition edge sensors (TESs) for industrial X-ray microanalysis. To obtain high count rate, high reliability, and high energy resolution, a large format array of the sensors and an integration of a TES calorimeter and a SQUID amplifier are requi...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2001-03, Vol.11 (1), p.751-754
Hauptverfasser:	Morooka, T., Tanaka, K., Nakayama, S., Nagata, A., Chinone, K., Ukibe, M., Hirayama, F., Ohkubo, M., Koyanagi, M., Mizuki, T., Hikosaka, T., Kawabe, U., Nemoto, T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Calorimetry Energy resolution Exact sciences and technology Fabrication Instruments Instruments, apparatus, components and techniques common to several branches of physics and astronomy Micromachining Physics Pulse amplifiers Sensor arrays Sensor phenomena and characterization Silicon on insulator technology SQUIDs Superconducting device noise Thermal instruments, apparatus and techniques
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