Demonstration of a monolithic multichannel module for multi-Gb/s intra-MCM optical interconnects

In this letter, we report on the demonstration of a 2.48-Gb/s multichannel optical data-link for intramultichip module interconnects. The optical module was fabricated in polymethylmethacrylate (PMMA) by deep proton lithography and monolithically integrates micromirrors and cylindrical lenses. With...

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Veröffentlicht in:	IEEE photonics technology letters 1998-11, Vol.10 (11), p.1629-1631
Hauptverfasser:	Verschaffelt, G., Buczynski, R., Tuteleers, P., Vynck, P., Baukens, V., Ottevaere, H., Debaes, C., Kufner, S., Kufner, M., Hermanne, A., Genoe, J., Coppee, D., Vounckx, R., Borghs, S., Veretennicoff, I., Thienpont, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Integrated circuit interconnections Integrated optics Lenses Micromirrors Microoptics Optical interconnections Optical receivers Optical refraction Optical transmitters Protons
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