Heterogeneous process simulation tool integration

An unified strategy for achieving heterogeneous tool integration within the technology computer-aided design (TCAD) realm is presented. Geometry, grid and surface mesh servers are defined and implemented in a program that contains the different data and provides common services for TCAD applications...

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Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 1996-02, Vol.9 (1), p.35-48
Hauptverfasser:	Sahul, Z.H., Wang, K.C., Ze-Kai Hsiau, McKenna, E.W., Dutton, R.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Application software Applied sciences Computational modeling Design automation Electronics Equations Etching Exact sciences and technology Geometry Microelectronic fabrication (materials and surfaces technology) Numerical simulation Oxidation Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Solid modeling Spine
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