Heterogeneous process simulation tool integration
An unified strategy for achieving heterogeneous tool integration within the technology computer-aided design (TCAD) realm is presented. Geometry, grid and surface mesh servers are defined and implemented in a program that contains the different data and provides common services for TCAD applications...
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| Veröffentlicht in: | IEEE transactions on semiconductor manufacturing 1996-02, Vol.9 (1), p.35-48 |
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| container_end_page | 48 |
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| container_title | IEEE transactions on semiconductor manufacturing |
| container_volume | 9 |
| creator | Sahul, Z.H. Wang, K.C. Ze-Kai Hsiau McKenna, E.W. Dutton, R.W. |
| description | An unified strategy for achieving heterogeneous tool integration within the technology computer-aided design (TCAD) realm is presented. Geometry, grid and surface mesh servers are defined and implemented in a program that contains the different data and provides common services for TCAD applications. These services form the backbone of the integration framework. Functional abstraction is used to provide unified access to the servers' data and procedures. The role of each server and their interactions, including those with applications, are delineated. Existing tools such as SUPREM-IV and SPEEDIE, together with new tools have been integrated to illustrate the utility and versatility of the approach. This paper discusses the integration strategy, shows results and fully specifies standard functional server interfaces needed for TCAD tool integration. |
| doi_str_mv | 10.1109/66.484281 |
| format | Article |
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Geometry, grid and surface mesh servers are defined and implemented in a program that contains the different data and provides common services for TCAD applications. These services form the backbone of the integration framework. Functional abstraction is used to provide unified access to the servers' data and procedures. The role of each server and their interactions, including those with applications, are delineated. Existing tools such as SUPREM-IV and SPEEDIE, together with new tools have been integrated to illustrate the utility and versatility of the approach. This paper discusses the integration strategy, shows results and fully specifies standard functional server interfaces needed for TCAD tool integration.</description><subject>Application software</subject><subject>Applied sciences</subject><subject>Computational modeling</subject><subject>Design automation</subject><subject>Electronics</subject><subject>Equations</subject><subject>Etching</subject><subject>Exact sciences and technology</subject><subject>Geometry</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>Numerical simulation</subject><subject>Oxidation</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. 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| identifier | ISSN: 0894-6507 |
| ispartof | IEEE transactions on semiconductor manufacturing, 1996-02, Vol.9 (1), p.35-48 |
| issn | 0894-6507 1558-2345 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Application software Applied sciences Computational modeling Design automation Electronics Equations Etching Exact sciences and technology Geometry Microelectronic fabrication (materials and surfaces technology) Numerical simulation Oxidation Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Solid modeling Spine |
| title | Heterogeneous process simulation tool integration |
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