Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor

This paper describes an interferometric pressure sensor designed to work as a remote sensor in a coherence modulation scheme, allowing a linear phase read-out of the signal. The sensor is realized from a silicon nitride waveguide Mach-Zehnder interferometer integrated on a (100) silicon substrate, a...

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Veröffentlicht in:	Journal of lightwave technology 1999-02, Vol.17 (2), p.229-233
Hauptverfasser:	Porte, H., Gorel, V., Kiryenko, S., Goedgebuer, J.-P., Daniau, W., Blind, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Biomembranes Circuit properties Deflection Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Fiber nonlinear optics Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics Integrated optoelectronics. Optoelectronic circuits Mach-Zehnder interferometers Mechanical instruments, equipment and techniques Membranes Micromachining Micromechanical devices and systems Micromechanics Nonlinear optics Optical and optoelectronic circuits Optical feedback Optical interferometry Optical ring resonators Optical sensors Optical waveguides Physics Pressure sensors Silicon Silicon substrates Waveguides
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