Shield-based microwave on-wafer device measurements

This paper introduces a shielding technique for use with microwave on-wafer device characterization. This results in a shield-based test fixture, which offers many advantages compared to conventional structures. Among others, the test fixture offers full scalability and very low cost, high measuring...

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Veröffentlicht in:	IEEE transactions on microwave theory and techniques 2001-06, Vol.49 (6), p.1039-1044
1. Verfasser:	Kolding, T.E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Calibration Circuit testing Devices Fixtures Integrated circuit measurements Leakage Loss measurement Low cost Microwave devices Microwave measurements Microwaves Radio frequency Scalability Shielding Silicon
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