Easy process for fabrication of high-reliability DC-SQUIDs

Easy process for fabrication of high-reliability DC-SQUIDs

A process to fabricate high-reliability DC-SQUIDs for the study of biomagnetism on 4-in silicon wafers by minimizing the steps of the fabrication process is discussed. Al films were used for the shunt and damping resistors to decrease the number of materials used in the fabrication. The large beta L...

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Veröffentlicht in:IEEE transactions on magnetics 1993-11, Vol.29 (6), p.3562-3564
Hauptverfasser: Chinone, K., Ataka, T., Shimizu, N.
Format: Artikel
Sprache:eng
Schlagworte:
Biological and medical sciences
Fabrication
Magnetic devices
Magnetic films
Magnetic materials
Medical sciences
Niobium
Radiotherapy. Instrumental treatment. Physiotherapy. Reeducation. Rehabilitation, orthophony, crenotherapy. Diet therapy and various other treatments (general aspects)
Rough surfaces
SQUIDs
Surface morphology
Surface roughness
Technology. Biomaterials. Equipments. Material. Instrumentation
Voltage
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Zusammenfassung:A process to fabricate high-reliability DC-SQUIDs for the study of biomagnetism on 4-in silicon wafers by minimizing the steps of the fabrication process is discussed. Al films were used for the shunt and damping resistors to decrease the number of materials used in the fabrication. The large beta L DC-SQUID device was adopted to increase the reliability of the process because of the small number of input coil turns needed. The reliability of the fabricated devices was tested by examining their current-voltage and flux-voltage characteristics. These characteristics were in close agreement with the calculated values. The critical current and the modulation depth of about 200 DC-SQUIDs across a single wafer agreed within +or-5%.< >
ISSN:0018-9464
1941-0069
DOI:10.1109/20.281230