Fabrication and characterization of high-T/sub c/ superconducting X-band resonators and bandpass filters
Microstrip passband filters with 3, 6, and 11 poles, as well as microstrip resonators, have been fabricated using postannealed Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub x/ (YBCO) films deposited on LaAlO/sub 3/ substrates using three-target simultaneous co-sputtering. The insertion loss in the passband for th...
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Veröffentlicht in: | IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) 1991-03, Vol.27 (2), p.2553-2556 |
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container_title | IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States) |
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creator | Rensch, D.B. Josefowicz, J.Y. Macdonald, P. Nieh, C.W. Hoefer, W. Krajenbrink, F. |
description | Microstrip passband filters with 3, 6, and 11 poles, as well as microstrip resonators, have been fabricated using postannealed Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub x/ (YBCO) films deposited on LaAlO/sub 3/ substrates using three-target simultaneous co-sputtering. The insertion loss in the passband for the filters with center frequencies between 9.5 and 13.4 GHz was |
doi_str_mv | 10.1109/20.133737 |
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The insertion loss in the passband for the filters with center frequencies between 9.5 and 13.4 GHz was <or=0.3 dB at 50 K and <or=0.6 dB at 77 K for the three- and six-pole filters, respectively. The out-of-band rejection was greater than 50 dB. The excellent filter performance was attributed to the use of highly c-axis oriented postannealed YBCO films. The quality of these films depended strongly on substrate preparation, film thickness, density of YBCO grain boundaries, and crystallographic orientation of the grains. Microstrip ring resonators fabricated with optimized YBCO films had Q values as large as 3800 at 9.5 GHz. The surface resistance and penetration depth for the YBCO films were determined from the temperature dependence of the measured Q values and resonant frequencies of the resonators.</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/20.133737</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>United States: IEEE</publisher><subject>360202 -- Ceramics, Cermets, & Refractories-- Structure & Phase Studies ; 665411 -- Basic Superconductivity Studies-- (1992-) ; ALKALINE EARTH METAL COMPOUNDS ; BARIUM COMPOUNDS ; BARIUM OXIDES ; CALCULATION METHODS ; CAVITY RESONATORS ; CHALCOGENIDES ; CHEMICAL PREPARATION ; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ; COPPER COMPOUNDS ; COPPER OXIDES ; CRYSTAL STRUCTURE ; CRYSTALLOGRAPHY ; ELECTRIC CONDUCTIVITY ; ELECTRICAL PROPERTIES ; ELECTRONIC EQUIPMENT ; FABRICATION ; FILTERS ; Frequency ; GRAIN BOUNDARIES ; HIGH-TC SUPERCONDUCTORS ; Insertion loss ; MATERIALS SCIENCE ; Microstrip filters ; Microstrip resonators ; MICROSTRUCTURE ; OXIDES ; OXYGEN COMPOUNDS ; Passband ; PENETRATION DEPTH ; PHYSICAL PROPERTIES ; Resonator filters ; RESONATORS ; SPUTTERING ; SUBSTRATES ; SUPERCONDUCTING CAVITY RESONATORS ; SUPERCONDUCTING DEVICES ; SUPERCONDUCTING FILMS ; SUPERCONDUCTIVITY ; SUPERCONDUCTORS ; Surface resistance ; SYNTHESIS ; TEMPERATURE DEPENDENCE ; TRANSITION ELEMENT COMPOUNDS ; Yttrium barium copper oxide ; YTTRIUM COMPOUNDS 665412 -- Superconducting Devices-- (1992-) ; YTTRIUM OXIDES</subject><ispartof>IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States), 1991-03, Vol.27 (2), p.2553-2556</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c1206-9cfcf43223fbaf2997ef9d759c4d694a642bb0e39d0c68574abfeb16afdc2f843</citedby><cites>FETCH-LOGICAL-c1206-9cfcf43223fbaf2997ef9d759c4d694a642bb0e39d0c68574abfeb16afdc2f843</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/133737$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>230,309,310,314,780,784,789,790,796,885,23930,23931,25140,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/133737$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttps://www.osti.gov/biblio/6089666$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Rensch, D.B.</creatorcontrib><creatorcontrib>Josefowicz, J.Y.</creatorcontrib><creatorcontrib>Macdonald, P.</creatorcontrib><creatorcontrib>Nieh, C.W.</creatorcontrib><creatorcontrib>Hoefer, W.</creatorcontrib><creatorcontrib>Krajenbrink, F.</creatorcontrib><title>Fabrication and characterization of high-T/sub c/ superconducting X-band resonators and bandpass filters</title><title>IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)</title><addtitle>TMAG</addtitle><description>Microstrip passband filters with 3, 6, and 11 poles, as well as microstrip resonators, have been fabricated using postannealed Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub x/ (YBCO) films deposited on LaAlO/sub 3/ substrates using three-target simultaneous co-sputtering. The insertion loss in the passband for the filters with center frequencies between 9.5 and 13.4 GHz was <or=0.3 dB at 50 K and <or=0.6 dB at 77 K for the three- and six-pole filters, respectively. The out-of-band rejection was greater than 50 dB. The excellent filter performance was attributed to the use of highly c-axis oriented postannealed YBCO films. The quality of these films depended strongly on substrate preparation, film thickness, density of YBCO grain boundaries, and crystallographic orientation of the grains. Microstrip ring resonators fabricated with optimized YBCO films had Q values as large as 3800 at 9.5 GHz. The surface resistance and penetration depth for the YBCO films were determined from the temperature dependence of the measured Q values and resonant frequencies of the resonators.</description><subject>360202 -- Ceramics, Cermets, & Refractories-- Structure & Phase Studies</subject><subject>665411 -- Basic Superconductivity Studies-- (1992-)</subject><subject>ALKALINE EARTH METAL COMPOUNDS</subject><subject>BARIUM COMPOUNDS</subject><subject>BARIUM OXIDES</subject><subject>CALCULATION METHODS</subject><subject>CAVITY RESONATORS</subject><subject>CHALCOGENIDES</subject><subject>CHEMICAL PREPARATION</subject><subject>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</subject><subject>COPPER COMPOUNDS</subject><subject>COPPER OXIDES</subject><subject>CRYSTAL STRUCTURE</subject><subject>CRYSTALLOGRAPHY</subject><subject>ELECTRIC CONDUCTIVITY</subject><subject>ELECTRICAL PROPERTIES</subject><subject>ELECTRONIC EQUIPMENT</subject><subject>FABRICATION</subject><subject>FILTERS</subject><subject>Frequency</subject><subject>GRAIN BOUNDARIES</subject><subject>HIGH-TC SUPERCONDUCTORS</subject><subject>Insertion loss</subject><subject>MATERIALS SCIENCE</subject><subject>Microstrip filters</subject><subject>Microstrip resonators</subject><subject>MICROSTRUCTURE</subject><subject>OXIDES</subject><subject>OXYGEN COMPOUNDS</subject><subject>Passband</subject><subject>PENETRATION DEPTH</subject><subject>PHYSICAL PROPERTIES</subject><subject>Resonator filters</subject><subject>RESONATORS</subject><subject>SPUTTERING</subject><subject>SUBSTRATES</subject><subject>SUPERCONDUCTING CAVITY RESONATORS</subject><subject>SUPERCONDUCTING DEVICES</subject><subject>SUPERCONDUCTING FILMS</subject><subject>SUPERCONDUCTIVITY</subject><subject>SUPERCONDUCTORS</subject><subject>Surface resistance</subject><subject>SYNTHESIS</subject><subject>TEMPERATURE DEPENDENCE</subject><subject>TRANSITION ELEMENT COMPOUNDS</subject><subject>Yttrium barium copper oxide</subject><subject>YTTRIUM COMPOUNDS 665412 -- Superconducting Devices-- (1992-)</subject><subject>YTTRIUM OXIDES</subject><issn>0018-9464</issn><issn>1941-0069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1991</creationdate><recordtype>article</recordtype><recordid>eNpFkM1LAzEQxYMoWKsHr54Wbx5i89Xs5ijFVqHgpYK3JZlNupG6KUl60L_etCt4esyb3zyGh9AtJY-UEjVjRTmveX2GJlQJigmR6hxNCKENVkKKS3SV0mcZxZySCeqX2kQPOvswVHroKuh11JBt9D-jGVzV-22PN7N0MBXMqnTY2whh6A6Q_bCtPrA5HkabwqBziOmUc_T2OqXK-V1JS9fowuldsjd_OkXvy-fN4gWv31avi6c1BsqIxAocOMEZ485ox5SqrVNdPVcgOqmEloIZQyxXHQHZzGuhjbOGSu06YK4RfIrux9yQsm8T-GyhL98OFnIrSaOklAV6GCGIIaVoXbuP_kvH75aS9thjy4qeeizs3ch6a-0_Ny5_AYH5btg</recordid><startdate>199103</startdate><enddate>199103</enddate><creator>Rensch, D.B.</creator><creator>Josefowicz, J.Y.</creator><creator>Macdonald, P.</creator><creator>Nieh, C.W.</creator><creator>Hoefer, W.</creator><creator>Krajenbrink, F.</creator><general>IEEE</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>199103</creationdate><title>Fabrication and characterization of high-T/sub c/ superconducting X-band resonators and bandpass filters</title><author>Rensch, D.B. ; Josefowicz, J.Y. ; Macdonald, P. ; Nieh, C.W. ; Hoefer, W. ; Krajenbrink, F.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1206-9cfcf43223fbaf2997ef9d759c4d694a642bb0e39d0c68574abfeb16afdc2f843</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1991</creationdate><topic>360202 -- Ceramics, Cermets, & Refractories-- Structure & Phase Studies</topic><topic>665411 -- Basic Superconductivity Studies-- (1992-)</topic><topic>ALKALINE EARTH METAL COMPOUNDS</topic><topic>BARIUM COMPOUNDS</topic><topic>BARIUM OXIDES</topic><topic>CALCULATION METHODS</topic><topic>CAVITY RESONATORS</topic><topic>CHALCOGENIDES</topic><topic>CHEMICAL PREPARATION</topic><topic>CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY</topic><topic>COPPER COMPOUNDS</topic><topic>COPPER OXIDES</topic><topic>CRYSTAL STRUCTURE</topic><topic>CRYSTALLOGRAPHY</topic><topic>ELECTRIC CONDUCTIVITY</topic><topic>ELECTRICAL PROPERTIES</topic><topic>ELECTRONIC EQUIPMENT</topic><topic>FABRICATION</topic><topic>FILTERS</topic><topic>Frequency</topic><topic>GRAIN BOUNDARIES</topic><topic>HIGH-TC SUPERCONDUCTORS</topic><topic>Insertion loss</topic><topic>MATERIALS SCIENCE</topic><topic>Microstrip filters</topic><topic>Microstrip resonators</topic><topic>MICROSTRUCTURE</topic><topic>OXIDES</topic><topic>OXYGEN COMPOUNDS</topic><topic>Passband</topic><topic>PENETRATION DEPTH</topic><topic>PHYSICAL PROPERTIES</topic><topic>Resonator filters</topic><topic>RESONATORS</topic><topic>SPUTTERING</topic><topic>SUBSTRATES</topic><topic>SUPERCONDUCTING CAVITY RESONATORS</topic><topic>SUPERCONDUCTING DEVICES</topic><topic>SUPERCONDUCTING FILMS</topic><topic>SUPERCONDUCTIVITY</topic><topic>SUPERCONDUCTORS</topic><topic>Surface resistance</topic><topic>SYNTHESIS</topic><topic>TEMPERATURE DEPENDENCE</topic><topic>TRANSITION ELEMENT COMPOUNDS</topic><topic>Yttrium barium copper oxide</topic><topic>YTTRIUM COMPOUNDS 665412 -- Superconducting Devices-- (1992-)</topic><topic>YTTRIUM OXIDES</topic><toplevel>online_resources</toplevel><creatorcontrib>Rensch, D.B.</creatorcontrib><creatorcontrib>Josefowicz, J.Y.</creatorcontrib><creatorcontrib>Macdonald, P.</creatorcontrib><creatorcontrib>Nieh, C.W.</creatorcontrib><creatorcontrib>Hoefer, W.</creatorcontrib><creatorcontrib>Krajenbrink, F.</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Rensch, D.B.</au><au>Josefowicz, J.Y.</au><au>Macdonald, P.</au><au>Nieh, C.W.</au><au>Hoefer, W.</au><au>Krajenbrink, F.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication and characterization of high-T/sub c/ superconducting X-band resonators and bandpass filters</atitle><jtitle>IEEE Transactions on Magnetics (Institute of Electrical and Electronics Engineers); (United States)</jtitle><stitle>TMAG</stitle><date>1991-03</date><risdate>1991</risdate><volume>27</volume><issue>2</issue><spage>2553</spage><epage>2556</epage><pages>2553-2556</pages><issn>0018-9464</issn><eissn>1941-0069</eissn><coden>IEMGAQ</coden><abstract>Microstrip passband filters with 3, 6, and 11 poles, as well as microstrip resonators, have been fabricated using postannealed Y/sub 1/Ba/sub 2/Cu/sub 3/O/sub x/ (YBCO) films deposited on LaAlO/sub 3/ substrates using three-target simultaneous co-sputtering. The insertion loss in the passband for the filters with center frequencies between 9.5 and 13.4 GHz was <or=0.3 dB at 50 K and <or=0.6 dB at 77 K for the three- and six-pole filters, respectively. The out-of-band rejection was greater than 50 dB. The excellent filter performance was attributed to the use of highly c-axis oriented postannealed YBCO films. The quality of these films depended strongly on substrate preparation, film thickness, density of YBCO grain boundaries, and crystallographic orientation of the grains. Microstrip ring resonators fabricated with optimized YBCO films had Q values as large as 3800 at 9.5 GHz. The surface resistance and penetration depth for the YBCO films were determined from the temperature dependence of the measured Q values and resonant frequencies of the resonators.</abstract><cop>United States</cop><pub>IEEE</pub><doi>10.1109/20.133737</doi><tpages>4</tpages></addata></record> |
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subjects | 360202 -- Ceramics, Cermets, & Refractories-- Structure & Phase Studies 665411 -- Basic Superconductivity Studies-- (1992-) ALKALINE EARTH METAL COMPOUNDS BARIUM COMPOUNDS BARIUM OXIDES CALCULATION METHODS CAVITY RESONATORS CHALCOGENIDES CHEMICAL PREPARATION CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY COPPER COMPOUNDS COPPER OXIDES CRYSTAL STRUCTURE CRYSTALLOGRAPHY ELECTRIC CONDUCTIVITY ELECTRICAL PROPERTIES ELECTRONIC EQUIPMENT FABRICATION FILTERS Frequency GRAIN BOUNDARIES HIGH-TC SUPERCONDUCTORS Insertion loss MATERIALS SCIENCE Microstrip filters Microstrip resonators MICROSTRUCTURE OXIDES OXYGEN COMPOUNDS Passband PENETRATION DEPTH PHYSICAL PROPERTIES Resonator filters RESONATORS SPUTTERING SUBSTRATES SUPERCONDUCTING CAVITY RESONATORS SUPERCONDUCTING DEVICES SUPERCONDUCTING FILMS SUPERCONDUCTIVITY SUPERCONDUCTORS Surface resistance SYNTHESIS TEMPERATURE DEPENDENCE TRANSITION ELEMENT COMPOUNDS Yttrium barium copper oxide YTTRIUM COMPOUNDS 665412 -- Superconducting Devices-- (1992-) YTTRIUM OXIDES |
title | Fabrication and characterization of high-T/sub c/ superconducting X-band resonators and bandpass filters |
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