Short channel threshold dependence of the inversion channel heterostructure field effect transistor

The threshold voltage dependence on the channel length for the inversion channel HFET is investigated. Modifying the charge equations to account for source and drain depletion into the channel region yields a length dependent threshold voltage equation. It is shown theoretically that the threshold m...

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Veröffentlicht in:IEEE transactions on electron devices 1994-10, Vol.41 (10), p.1871-1873
Hauptverfasser: Taylor, G.W., Kiely, P.A.
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description The threshold voltage dependence on the channel length for the inversion channel HFET is investigated. Modifying the charge equations to account for source and drain depletion into the channel region yields a length dependent threshold voltage equation. It is shown theoretically that the threshold may increase or decrease with decreasing gate length as the doping parameters are changed, which is supported by experiment. Using the new threshold equation parameters have been found which should allow length invariant thresholds.< >
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Modifying the charge equations to account for source and drain depletion into the channel region yields a length dependent threshold voltage equation. It is shown theoretically that the threshold may increase or decrease with decreasing gate length as the doping parameters are changed, which is supported by experiment. 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Modifying the charge equations to account for source and drain depletion into the channel region yields a length dependent threshold voltage equation. It is shown theoretically that the threshold may increase or decrease with decreasing gate length as the doping parameters are changed, which is supported by experiment. Using the new threshold equation parameters have been found which should allow length invariant thresholds.&lt; &gt;</abstract><pub>IEEE</pub><doi>10.1109/16.324602</doi><tpages>3</tpages></addata></record>
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subjects Doping
Equations
FETs
HEMTs
Heterojunctions
MODFETs
Optoelectronic devices
P-n junctions
Semiconductor process modeling
Threshold voltage
title Short channel threshold dependence of the inversion channel heterostructure field effect transistor
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