Realtime X-ray reflectometry to see changes at buried interfaces
Abstract only X-ray reflectometry is powerful in determining internal structure of multilayered thin films, such as thickness and density of each layer, as well as the roughness of surface and interfaces [1]. The measurement requires some precise angular scans near the critical angle with monochroma...
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| Veröffentlicht in: | Acta crystallographica. Section A, Foundations and advances Foundations and advances, 2014-08, Vol.70 (a1), p.C878-C878 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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