Infrared optical properties of mixed-phase thin films studied by spectroscopic ellipsometry using boron nitride as an example

We present a microstructure-dependent anisotropic infrared-optical dielectric function model for mixed-phase polycrystalline material from which we derive the transverse and longitudinal-optical modes observable in thin films. Infrared ellipsometry over the wavelength range from 700 to 3000cm{sup {m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Physical Review, B: Condensed Matter B: Condensed Matter, 1997-11, Vol.56 (20), p.13306-13313
Hauptverfasser:	Schubert, M., Rheinländer, B., Franke, E., Neumann, H., Tiwald, T. E., Woollam, J. A., Hahn, J., Richter, F.
Format:	Artikel
Sprache:	eng
Schlagworte:	BORON NITRIDES COATINGS DIELECTRIC PROPERTIES ELLIPSOMETRY INFRARED RADIATION MATERIALS SCIENCE MICROSTRUCTURE OPTICAL PROPERTIES PHONONS THIN FILMS
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!