Sub-10 nm fabrication: methods and applications

Reliable fabrication of micro/nanostructures with sub-10 nm features is of great significance for advancing nanoscience and nanotechnology. While the capability of current complementary metal-oxide semiconductor (CMOS) chip manufacturing can produce structures on the sub-10 nm scale, many emerging a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	International Journal of Extreme Manufacturing 2021-07, Vol.3 (3), p.32002
Hauptverfasser:	Chen, Yiqin, Shu, Zhiwen, Zhang, Shi, Zeng, Pei, Liang, Huikang, Zheng, Mengjie, Duan, Huigao
Format:	Artikel
Sprache:	eng
Schlagworte:	atomic-scale manufacturing CMOS extremely small manufacturing Nano-optics nanolithography nanomanufacturing Nanotechnology Production methods sub-10 nm fabrication
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!