Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma

In general, as the radio frequency (RF) power increases in a capacitively coupled plasma (CCP), the power transfer efficiency decreases because the resistance of the CCP decreases. In this work, a parallel resonance circuit is applied to improve the power transfer efficiency at high RF power, and th...

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Veröffentlicht in:	Plasma science & technology 2023-04, Vol.25 (4), p.45401
Hauptverfasser:	HE, You, LIM, Yeong-Min, LEE, Jun-Ho, KIM, Ju-Ho, LEE, Moo-Young, CHUNG, Chin-Wook
Format:	Artikel
Sprache:	eng
Schlagworte:	capacitively coupled plasma electron energy distribution function parallel resonance
Online-Zugang:	Volltext
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