Improvement of plasma uniformity and mechanical properties of Cr films deposited on the inner surface of a tube by an auxiliary anode near the tube tail

In order to improve the length of plasma in a whole tube and mechanical properties of Cr films deposited on the inner surface of the tube, a high-power impulse magnetron sputtering coating method with a planar cathode target and auxiliary anode was proposed. The auxiliary anode was placed near the t...

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Veröffentlicht in:	Plasma science & technology 2022-05, Vol.24 (5), p.54008
Hauptverfasser:	WU, Houpu, TIAN, Xiubo, ZHENG, Linlin, GONG, Chunzhi, LUO, Peng
Format:	Artikel
Sprache:	eng
Schlagworte:	auxiliary anode Cr films high-power impulse magnetron sputtering inner surface
Online-Zugang:	Volltext
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