Power absorption, plasma parameters and wave structure in inductive RF plasma source with low value external magnetic field

The efficiency of radio-frequency (RF) power absorption, RF magnetic field structure and plasma parameters were measured in cylindrical inductive RF plasma sources 20 cm in diameter and 22, 32, 53 cm in length with a low value external magnetic field. The experiments were carried out in argon at pre...

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Veröffentlicht in:	Plasma science & technology 2020-11, Vol.22 (11), p.115404
Hauptverfasser:	KRALKINA, Elena, VAVILIN, Konstantin, ZADIRIEV, Ilya, NIKONOV, Alexander
Format:	Artikel
Sprache:	eng
Schlagworte:	helicon inductive discharge plasma radio-frequency Trivelpiece-Gould waves
Online-Zugang:	Volltext
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