Influence of surface layer properties on the thermo-electro-mechanical characteristics of a MEMS/NEMS piezoresistive cantilever surface stress sensor

In the past decade, micro/nano cantilever platforms have been actively explored for realizing variety of MEMS/NEMS sensor and actuator systems. In treatise, a majority of the cantilever platform based devices reported are non-monolithic structures with additional functional layers for improving thei...

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Veröffentlicht in:	Materials research express 2019-05, Vol.6 (8), p.86304
Hauptverfasser:	Mathew, Ribu, Ravi Sankar, A
Format:	Artikel
Sprache:	eng
Schlagworte:	functionalization layer micro/nano cantilever multi-layer multi-morph effect surface stress thermal drift
Online-Zugang:	Volltext
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