Characterization of small-scale surface topography using transmission electron microscopy

Multi-scale surface topography is critical to surface function, yet the very smallest scales of topography are not accessible with conventional measurement techniques. Here we demonstrate two separate approaches for measuring small-scale topography in a transmission electron microscope (TEM). The fi...

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Veröffentlicht in:	Surface topography metrology and properties 2018-10, Vol.6 (4), p.45004
Hauptverfasser:	Khanal, Subarna R, Gujrati, Abhijeet, Vishnubhotla, Sai Bharadwaj, Nowakowski, Pawel, Bonifacio, Cecile S, Pastewka, Lars, Jacobs, Tevis D B
Format:	Artikel
Sprache:	eng
Schlagworte:	Hurst exponent and fractal dimension power spectral density (PSD) root-mean-square (RMS) slope surface roughness metrics surface topography TEM sample preparation transmission electron microscopy (TEM)
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