Selection of the confining beam for laser direct writing with scanning absorbance modulation

Absorbance-modulation optical lithography has been proposed to obtain super-resolution grating patterns with far-field optics. However, the patterns are monotonous since the interference fringes are used as the confining beam. We propose laser direct writing with scanning absorbance modulation to pr...

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Veröffentlicht in:	Journal of optics (2010) 2019-10, Vol.21 (10), p.105402
Hauptverfasser:	Li, Xiongfeng, Liang, Yiyong
Format:	Artikel
Sprache:	eng
Schlagworte:	absorbance modulation laser direct writing optical vortex beam
Online-Zugang:	Volltext
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