Sampling of plasma plume from atmosphere into vacuum for reliable Langmuir probe diagnostics

Langmuir probes cannot be used to diagnose cold atmospheric plasma jet, because their presence in the high electric field after-glow region modifies the plasma parameters that they are intended to measure. Here, we propose a system to sample the plasma plume from ambient conditions into a low-pressure region, where probe analysis can be accomplished. The effect of such a sampling process on the number density and velocity of the gas has been studied through simulations and using analytical equations. Simulation results regarding the effect of chamber and orifice dimensions on these parameters, have been presented. Based on this study an experimental chamber was fabricated and Langmuir probe analysis of the sampled plasma was done. Continuum flowing plasma theory was applied and the plasma density and electron temperature were estimated to be 1.8 × 10 20 m −3 and 4.7 eV respectively for the operating condition of 3 W plasma power at 12 kHz.