Meso scale flextensional piezoelectric actuators

Meso scale flextensional piezoelectric actuators

We present an ultra-thin meso scale piezoelectric actuator consisting of a piezoceramic beam and a carbon fiber displacement-amplification frame. We show that the actuator can be designed to achieve a wide range of force/displacement characteristics on the mN/ m scales. The best performing design ac...

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Veröffentlicht in:Smart materials and structures 2018-01, Vol.27 (1), p.15008
Hauptverfasser: York, Peter A, Jafferis, Noah T, Wood, Robert J
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Sprache:eng
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laser micromachining
meso scale devices
micromanipulation
multi-material laminates
piezoelectric actuators
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Jafferis, Noah T
Wood, Robert J
description We present an ultra-thin meso scale piezoelectric actuator consisting of a piezoceramic beam and a carbon fiber displacement-amplification frame. We show that the actuator can be designed to achieve a wide range of force/displacement characteristics on the mN/ m scales. The best performing design achieved a free displacement of 106 m and a blocked force of 73 mN, yielding a total energy density of 0.51 Jkg − 1 for the 7.6 mg system. We describe a printed circuit MEMS process for fabricating the actuator that incorporates laser micromachining, chemical vapor deposition, and precision carbon fiber lamination. Lastly, we report the incorporation of the actuator into a microgripper and describe other promising application opportunities in micro-optics and micro-laser systems.
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source IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link
subjects laser micromachining
meso scale devices
micromanipulation
multi-material laminates
piezoelectric actuators
title Meso scale flextensional piezoelectric actuators
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